Datasheet > FM361

FM361

更新时间： 2024-09-08 22:40:55

品牌	Logo	应用领域
其他 - ETC		控制器
页数	文件大小	规格书
3页	153K
描述
Mass Flow Controllers and Flowmeters

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FM361 数据手册

Tylan FC260/FM360

Mass Flow Controllers and Flowmeters

Low cost mass flow controllers with long-term repeatability and performance

Process Values

Designed to meet the exacting requirements of

semiconductor processes and equipment, the

Tylan FC260 and Tylan FM360 models are

premium quality elastomer-sealed mass flow

controllers and meter. These MFCs combine

proven components and techniques with

innovative concepts in both mechanical and

electrical design.

Excellent Performance

Tylan FC260 qnd FM360 mass flow controllers and

flowmeters accurately and reliably measure and

control flow rates of gases up to 200 standard liters

per minute without the need for pressure or

temperature corrections.

Product Features

Product Benefits

Attitude Insensitive Flow Sensor

Eliminates air convection currents inside its case without sacrificing

response speed.

Can be mounted in any position without requiring zero adjustment.

Assures accuracy over the entire range of mass flow controller.

Superior Bypass Design to Operate

under Laminar Flow Conditions

Easily removed for range changes.

Solid State Valve Assembly

Constructed of Type 316 Stainless

Steel

Completely compatible with reactive and corrosive materials.

Design eliminates internal dead volumes.

Laminar Flow

Eliminates the need for complex, interactive multi-point linearization

during calibration

12 3

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