Micromachined Silicon Pressure Sensors
Uncompensated and
XSXL, XSX,
Compensated and Calibrated
XSCL, XSC Series
FEATURES
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Low Cost, Small Size
Temperature
Compensated
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Zero and Span Calibrated
Millivolt Output
Differential, Gage and
Absolute Pressure
Constant Voltage
Excitation
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High Impedance — Low
Current
TYPICAL APPLICATIONS
The XSXL/XSX and XSCL/XSC Series sensors integrate silicon
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Medical Applications
Applications Requiring
Small Size
micromachined sensing technology, temperature compensation, and
calibration in a complete family of low cost packages. This series offers the
most cost-effective solution for design requirements.
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Applications Requiring
Vacuum and Positive
Pressure Reference, or
Both
These piezoresistive pressure sensors use micromachined silicon chips
mounted on a ceramic and protected with a plastic cap. Several tube
arrangements with nylon housings are available for various pressure
applications.
On devices of 5 psi and above, the topside of the chip is protected
against humidity by a Silgel coating. While the sensors are designed for
use with noncorrosive, nonionic pressure media, they accommodate many
gases that are used in medical applications.
WARNING
WARNING
MISUSE OF DOCUMENTATION
PERSONAL INJURY
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The information presented in this product sheet is for reference only. Do
not use this document as product installation information.
Complete installation, operation, and maintenance information is
provided in the instructions supplied with each product.
DO NOT USE these products
as safety or emergency stop
devices or in any other
application where failure of the
product could result in
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Failure to comply with these instructions could result in death or serious
injury.
personal injury.
Failure to comply with these
instructions could result in
death or serious injury.
Sensing and Control