Order this document
by XMMAS500G/D
SEMICONDUCTOR TECHNICAL DATA
MICROMACHINED
ACCELEROMETER
±500g Amplified
The MMAS500G family of silicon capacitive, micro–machined accelerome-
ters features integral signal amplification, signal conditioning, a 4–pole
low–pass filter and temperature compensation. Zero–G offset, full scale span
and filter roll–off are factory set and require no external passives. A calibrated
self–test feature mechanically displaces the seismic mass with the application
of a digital self–test signal. The device is offered in either of two plastic
packages, thereby accommodating various axis orientation requirements.
The MMAS500G incorporates a single polysilicon seismic mass, suspended
between two fixed polysilicon plates (G–cell). The forces of acceleration move
the seismic mass, thereby resulting in a change in capacitance. The G–cell is
sealed at the die level, creating a particle–free environment. The G–cell
features built–in damping and over–range stops to protect it from mechanical
shock.
±500g AMPLIFIED
DIP PACKAGE
SIP PACKAGE
MMAS500G accelerometers are ideally suited for automotive crash detection
and recording, vibration monitoring, automotive suspension control, appliance
control systems, etc.
CASE 648C–03
CASE 447–01
Features
PIN NUMBER
•
•
•
•
•
•
Full Scale Measurement ±500g
Calibrated, True Self–Test
1
2
3
4
5
6
7
8
N/C (1)
N/C (1)
N/C (1)
Self–Test
Output
9
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
N/C (1)
10
11
12
13
14
15
16
Standard 16–Pin Plastic DIP
Integral Signal Conditioning and 4–Pole Filter
Linear Output
Robust, High Shock Survivability
Bypass (2)
GND
SIMPLIFIED BLOCK DIAGRAM
V
S
(2)
NOTES:
+
+
1. Internal connections. All N/C must
remain floating, except DIP’s pin
11 which must be tied to pin 8.
2. Bypass to ground with 0.1 µF ceramic
capacitortoimprovenoiseperformance.
4
SELF–TEST
8
V
S
+
g
A
G–CELL
6
5
BYPASS
OUTPUT
TEMPERATURE
COMPENSATION
LOW–PASS FILTER
7
GND
This document contains information on a product under development. Motorola reserves the right to change or discontinue this product without notice.
Motorola Sensor Device Data
1
Motorola, Inc. 1995