COMMERCIAL LASERS
High-Power Q-Switched Diode-Pumped UV Laser
Q Series
Key Features
• Highest commercially available pulse energy and peak power
• Tighter process control due to superior energy stability
enabled by unique intracavity harmonic generation
• Capable of processing widest range of materials due to wide
range of pulse energies and repetition rates
• High reliability due to low fluence in harmonic crystals and
no cavity optic coatings exposed to UV
• 355 or 532 nm outputs available
Applications
The JDSU Q Series lasers lead the market for high-power Q-switched diode-pumped
UV lasers used for a wide variety of micromachining and solar cell processing
applications. Whether for high pulse-energy processing of refractory materials
such as silicon; high repetition rate processing of packaging materials such as
Kapton; or patterning thin-film solar cells, the Q Series lasers deliver unsurpassed
performance combined with industry-leading uptime.
• Solar cell processing
• Wafer scribing
• Full-cut thin wafer dicing
• Low-k dielectric grooving
• Micro via drilling
• Micromachining of silicon and metals
Due to the self-stabilizing characteristics of intracavity UV harmonic generation,
all Q Series lasers exhibit inherently high pulse-to-pulse energy and long-term
output power stability. In addition, the excellent thermal stability of the unique
Nd:YAG-based direct-coupled pump (DCP) architecture maintains exceptionally
stable beam position and profile, which is important for processes requiring
accurate feature placement. These advantages enable Q series lasers to achieve
the tightest possible process tolerances for micromachining and other materials
processing applications.
NORTH AMERICA: 800 498-JDSU (5378)
WORLDWIDE: +800 5378-JDSU
WEBSITE: www.jdsu.com