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MPXM2010

更新时间: 2024-11-11 04:14:43
品牌 Logo 应用领域
飞思卡尔 - FREESCALE 传感器压力传感器温度补偿
页数 文件大小 规格书
9页 260K
描述
10 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors

MPXM2010 数据手册

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MPXM2010  
Rev 4, 09/2005  
Freescale Semiconductor  
Technical Data  
10 kPa On-Chip Temperature  
Compensated & Calibrated  
Silicon Pressure Sensors  
MPXM2010  
SERIES  
The MPXM2010 device is a silicon piezoresistive pressure sensor providing a  
highly accurate and linear voltage output – directly proportional to the applied  
pressure. The sensor is a single, monolithic silicon diaphragm with the strain  
gauge and a thin-film resistor network integrated on-chip. The chip is laser  
trimmed for precise span and offset calibration and temperature compensation.  
FREESCALE PREFERRED  
DEVICE  
0 to 10 kPa (0 to 1.45 psi)  
25 mV FULL SCALE SPAN  
(TYPICAL)  
Features  
Temperature Compensated Over 0°C to +85°C  
Available in Easy-to-Use Tape & Reel  
Ratiometric to Supply Voltage  
Gauge Ported & Non Ported Options  
Application Examples  
Respiratory Diagnostics  
Air Movement Control  
Controllers  
MPXM2010D/DT1  
CASE 1320-02  
Pressure Switching  
Figure 1 shows a block diagram of the internal circuitry on the stand-alone  
pressure sensor chip.  
ORDERING INFORMATION  
MPXM2010GS/GST1  
CASE 1320A-02  
Device Type/Order No.  
MPXM2010D  
Options  
Case No.  
1320  
Non-ported  
MPXM2010DT1  
MPXM2010GS  
MPXM2010GST1  
Non-ported, Tape and Reel  
Ported  
1320  
PIN NUMBERS  
1320A  
1320A  
1
2
GND  
+Vout  
3
4
VS  
Ported, Tape and Reel  
–Vout  
VS  
3
Thin Film  
2
4
Temperature  
Compensation  
and  
Calibration  
Circuitry  
+Vout  
–Vout  
Sensing  
Element  
1
GND  
Figure 1. Fully Integrated Pressure Sensor Schematic  
© Freescale Semiconductor, Inc., 2005. All rights reserved.  

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