19-3247; Rev 1; 2/05
Dual Per-Pin Parametric
Measurement Units
General Description
Features
♦ Force Voltage/Measure Current (FVMI)
♦ Force Current/Measure Voltage (FIMV)
♦ Force Voltage/Measure Voltage (FVMV)
♦ Force Current/Measure Current (FIMI)
♦ Force Nothing/Measure Voltage (FNMV)
The MAX9951/MAX9952 dual parametric measurement
units (PMUs) feature a small package size, wide force and
measurement range, and high accuracy, making the
devices ideal for automatic test equipment (ATE) and other
instrumentation that requires a PMU per pin or per site.
The MAX9951/MAX9952 force or measure voltages in the
-2V to +7V through -7V to +13V ranges, dependent upon
♦ Force Nothing/Measure Current (FNMI,
Range E Only)
the supply voltage (V
and V ). The devices handle
EE
CC
supply voltages of up to +30V (V
to V ) and a 20V
EE
♦ Termination/Measure Current
♦ Termination/Measure Voltage
CC
device-under-test (DUT) voltage swing at full current. The
MAX9951/MAX9952 also force or measure currents up to
±±6mA with a lowest full-scale range of ±2ꢀA. ꢁntegrated
support circuitry facilitates use of an external buffer ampli-
fier for current ranges greater than ±±6mA.
♦ Five Programmable Current Ranges
±±2µ
±±ꢀ2µ
±±ꢀꢀ2µ
±±mµ
A voltage proportional to the measured output voltage
or current is provided at the MSR_ output. ꢁntegrated
comparators, with externally set voltage thresholds,
provide detection for both voltage and current levels.
The MSR_ and comparator outputs can be placed in a
high-impedance state. Separate FORCE and SENSE
connections are short-circuit protected for voltages
±ꢁ6mµ
♦ -±V to +7V Through -7V to +13V Input-Voltage
Range
♦ Force-Current/Measure-Current µdjustable-
Voltage Offset (IOS)
♦ Programmable Voltage Clamps at Force Output
from (V - 0.3V) to (V
+ 0.3V). The FORCE output
EE
CC
♦ Low-Leakage, High-Impedance Measure, and
also features a low-leakage, high-impedance state.
Force States
ꢁntegrated voltage clamps limit the force output to lev-
els set externally. The force-current or the measure-cur-
rent voltage can be offset -0.2V to +6.6V (ꢁOS). This
feature allows for the centering of the control or mea-
sured signal within the external DAC or ADC range.
♦ 3-Wire Serial Interface
♦ Low ꢁmµ (max) Quiescent Current per PMU
Ordering Information
The MAX9951D/MAX9952D feature an integrated 10k
force-sense resistor between FORCE_ and SENSE_.
The MAX9951F/MAX9952F have no internal force-sense
resistor. These devices are available in a ±6-pin, 10mm
x 10mm, 0.5mm pitch TQFP package with an exposed
8mm x 8mm die pad on the top (MAX9951) or the bot-
tom (MAX9952) of the package for efficient heat
removal. The exposed pad is internally connected to
PµRT
TEMP RµNGE
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
PIN-PµCKµGE
±6 TQFP-EPR
±6 TQFP-EPR
±6 TQFP-EP
MµX9951DCCB
MAX9951FCCB*
MµX995±DCCB
MAX9952FCCB*
±6 TQFP-EP
*Future product—contact factory for availability.
V
. The MAX9951/MAX9952 are specified over the
commercial 0°C to +70°C temperature range.
EE
Applications
Selector Guide
Memory Testers
PµRT
DESCRIPTION
ꢁnternal 10k force-sense resistor
External force-sense resistor
ꢁnternal 10k force-sense resistor
External force-sense resistor
VLSꢁ Testers
MAX9951DCCB
MAX9951FCCB
MAX9952DCCB
MAX9952FCCB
System-on-a-Chip Testers
Structural Testers
Pin Configurations appear at end of data sheet.
________________________________________________________________ Maxim Integrated Products
1
For pricing, delivery, and ordering information, please contact Maxim/Dallas Direct! at
1-888-629-4642, or visit Maxim’s website at www.maxim-ic.com.