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ESCP-MIS1-1-012BA-01 PDF预览

ESCP-MIS1-1-012BA-01

更新时间: 2024-10-15 02:41:43
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ES /
页数 文件大小 规格书
19页 1577K
描述
MEMS Capacitive Pressure & Temperature Sensor for gases & liquids.

ESCP-MIS1-1-012BA-01 数据手册

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Datasheet ESCP-MIS1  
MEMS Capacitive Pressure & Temperature Sensor for gases & liquids.  
State of the art performance due to MEMS capacitive technology  
Outstanding overpressure tolerance (up to 100x)  
Absolute operation  
Full scale pressure sensor options from 10 to 350 bar  
Temperature sensor: -40oC to +125oC  
Calibrated & temperature compensated output  
I2C, SPI or analog interface  
Excellent accuracy, resolution, long term stability  
Low power consumption  
No external components required  
Product Summary  
ES Systems has developed a series of medium isolated pressure sensors suitable for  
applications with harsh environmental conditions where resistance to corrosive fluids or gases  
is required. Each sensor integrates a MEMS capacitive pressure sensor die, and a CMOS ASIC  
for the signal conditioning. The MEMS pressure sensor dies are underpinned by ES Systems’  
innovative microfabrication process for silicon capacitive sensors.  
The capacitive pressure sensor dies integrated into the medium isolated pressure systems  
provide state-of-the-art accuracy and resolution, excellent long-term stability combined with  
very good repeatability and hysteresis. The total overall error including thermal offsets is lower  
than ±0.25% FS.  
The ESCP-MIS1 is a family of pressure sensors in the standard Ø19 stainless steel 316L capsule.  
In this type of sensors, the pressure is transferred hydraulically to the hermetically sealed  
sensing element through the oil used to fill the cavity between the sensing element and the  
stainless steel diaphragm. The pressure capsule interface is either I2C, SPI or analog. The  
sensors are provided calibrated and compensated at various temperature and pressure  
ranges from 10 bara to 350 bara. Custom materials like Hastelloy or Titanium are available  
upon request.  
Typical Applications  
Gas, Liquid Pressure Measurement  
Corrosive Fluids and Gas Measurement Systems  
Sealed Systems  
Manifold Pressure Measurement  
Submersible Depth Monitoring  
Medical Instruments  
Industrial Process Control  
Pressure Calibrator  
Pressure Transmitter Integration  
Refrigeration Equipment & Air Conditioner  
OEM equipment  
v1.6  

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