SERIES
DP2
High-performance Digital Pressure Sensor
Digital Automatic sensitivity With analog
setting
output
Complete functionality!
Selection from a wide
lineup
* Passed the UL 991 Environment Test
* UL 61010C-1 compatible, Passed the UL 991 Environment Test based on SEMI S2-0200.
[Category applicable for semiconductor manufacturing: TWW2, Process Equipment]
[Applicable standards: UL 61010C-1]
UL Recognition
(Excluding 5 m cable length type)
Conforming to
EMC Directive
[Additional test / evaluation standards as per intended use: UL991, SEMI S2-0200]
Clearly visible LED display with 31/
Bright red LED 7-segment display having 31/
digits, 10 mm 0.394 in high. The displayed
figures are remarkably noticeable not only in
a dark area, but also in a well-lit place.
2
digits
High accuracy • high resolution • high speed
Setting with easy key operation
It achieves a 2.5 ms, or less, response
time at a high resolution of 1/1,000.
It enables highly accurate sensing with its
excellent repeatability and temperature
characteristics.
Initialization and threshold value
settings are easily done by key
operation while seeing the values on
the display.
2
Response time
2.5 ms or less
Incorporates
minus sign
Repeatability
Withinꢀ0.2 % F.S.ꢀ1 digit
Temperature characteristics
Withinꢀ1 % F.S.
‘ꢁ
’
indication
Four output modes enable versatile pressure level control
Selection from six pressure units
Hysteresis mode
Window comparator mode
1
2
The pressure unit can be selected
from six different systems to suit your
requirement.
Hysteresis
Hysteresis
Hysteresis
ON
ON
Comparative
Output 1
Comparative
Output 1
The selectable pressure units differ
with the sensor type. When the pres-
sure unit is changed, the measured
pressure value and the set values
OFF
ON
OFF
ON
Comparative
Output 2
Comparative
Output 2
OFF
0
OFF
0
(
)
Set Value 1 (P-1) Set Value 2 (P-2)
High pressure (Positive pressure type)
High vacuum (Vacuum pressure type)
Set Value 1 (P-1) Set Value 2 (P-2)
High pressure (Positive pressure type)
High vacuum (Vacuum pressure type)
are automatically converted.
The common hysteresis of the comparative
outputs can be set, as desired, with the set values.
The comparative outputs can be turned ON or
OFF by a pressure which is within the pressure
range set by Set Value 1 and Set Value 2.
International
System of
Units (SI)
Dual output mode
Automatic sensitivity setting mode
4
3
inHg
kPa
kgf/cm2
(Note)
Hysteresis
ON
Hysteresis
ON
Comparative
Output 1
Comparative
Output 1
mmHg
psi
bar
OFF
ON
OFF
ON
Comparative
Output 2
: Vacuum pressure type
: Positive pressure type
Comparative
Output 2
OFF
0
OFF
0
Set Value 1 (P-1) Set Value 2 (P-2)
Set Value 3 (P-3)
Note: ‘MPa’ in case of DP2-22ꢂ, DP2-42ꢂ and
DP2-62ꢂ.
Set Value 1 (P-1) Set Value 2 (P-2)
High pressure (Positive pressure type)
High vacuum (Vacuum pressure type)
High pressure (Positive pressure type)
High vacuum (Vacuum pressure type)
The outputs can be put to different use, such as,
detection of different kinds of objects, control
function, alarm function etc.
Using actual objects, if the pressure values for OK
objects and NG objects are input, then the sensor
is automatically set to the optimum pressure value
(mid-value).
792