Maximum module configuration
The B1500A can contain up to 4 dual-slot
SMUs (HPSMUs) and 2 single-slot SMUs
(MPSMUs and/or HRSMUs); it can contain
up to 10 single-slot SMUs (MPSMUs
and/or HRSMUs); and it can contain any
combination of dual-slot and single-slot
SMUs between these two eꢀtremes.
Only one single-slot MFCMU can be
installed per B1500A mainframe. Up to five
single-slot HV-SPGUs can be installed per
mainframe. Up to five single-slot WGFMUs
can be installed per mainframe.
GNDU supplemental information
MPSMU
HRSMU
HPSMU
MFCMU
HV-SPGU
WGFMU
2
2
14
7
12
10
Load capacitance: 1 µF
Cable resistance:
For IS ≤ 1.6 A: force line R < 1 Ω
For 1.6 A < IS ≤ 2.0 A: force line R < 0.7 Ω
For 2.0 A < IS ≤ 4.2 A: force line R < 0.35 Ω
For all cases: sense line R ≤ 10 Ω
Where IS is the current being sunk by
the GNDU.
Maximum voltage between common
and ground
≤
42 V
Ground unit (GNDU) specification
The GNDU is furnished standard with the
B1500A mainframe.
When one or more WGFMU modules are
installed in the B1500A mainframe, the
following table applies. Multiply the values
given below by the number of installed
modules of that type and add the products
together. The sum of the products must be
less than or equal to 59 for the configura-
tion to be permissible.
Output voltage: 0 V 100 µV
Maꢀimum sink current: 4.2 A
Output terminal/connection:
Triaꢀial connector, Kelvin (remote sensing)
MPSMU and HRSMU module specifications
Voltage range, resolution, and accuracy (high resolution ADC)
Voltage range
0.5 V
Force resolution
25 µV
Measure resolution
Force accuracy¹
(0.018 % ꢁ 150 µV)
(0.018 % ꢁ 400 µV)
(0.018 % ꢁ 750 µV)
(0.018 % ꢁ 3 mV)
(0.018 % ꢁ 6 mV)
(0.018 % ꢁ 15 mV)
Measure accuracy¹
(0.01 % ꢁ 120 µV)
(0.01 % ꢁ 140 µV)
(0.009 % ꢁ 250 µV)
(0.009 % ꢁ 900 µV)
(0.01 % ꢁ 1 mV)
Maximum current
0.5 µV
2 µV
100 mA
100 mA
100 mA
100 mA
²
2 V
5 V
100 µV
250 µV
1 mV
5 µV
20 V
40 V
100 V
20 µV
40 µV
100 µV
2 mV
5 mV
(0.012 % ꢁ 2.5 mV)
²
1. (% of read value ꢁ offset voltage V)
2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts.
Current range, resolution, and accuracy (high resolution ADC)
SMU type
Current
range
1 pA
Force
Measure
Force accuracy³
Measure accuracy³
Maximum
voltage
100 V
,
resolution resolution¹²
HRSMU w/ ASU
HRSMU
1 fA
5 fA
100 aA
(0.9 %ꢁ15 fA)
(0.9 %ꢁ12 fA)
(0.46 %ꢁ15 fAꢁ10 aA ꢀ Vo)
10 pA
400 aA (with ASU) (0.46 %ꢁ30 fAꢁ10 aA ꢀ Vo)
1 fA (HRSMU)
100 V
100 pA
5 fA
500 aA (with ASU) (0.3 %ꢁ100 fAꢁ100 aA ꢀ Vo)
2 fA (HRSMU)
(0.3 %ꢁ30 fAꢁ100 aA ꢀ Vo)
100 V
MPSMU
1 nA
10 nA
100 nA
1 µA
10 µA
100 µA
1 mA
50 fA
500 fA
5 pA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
10 fA
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
(0.1 %ꢁ300 fAꢁ1 fA ꢀ Vo)
(0.1 %ꢁ3 pAꢁ10 fA ꢀ Vo)
(0.05 %ꢁ30 pAꢁ100 fA ꢀ Vo)
(0.05 %ꢁ300 pAꢁ1 pA ꢀ Vo)
(0.05 %ꢁ3 nAꢁ10 pA ꢀ Vo)
(0.035 %ꢁ15 nAꢁ100 pA ꢀ Vo) (0.03 %ꢁ3 nAꢁ100 pA ꢀ Vo)
(0.04 %ꢁ150 nAꢁ1 nA ꢀ Vo)
(0.04 %ꢁ1.5 µAꢁ10 nA ꢀ Vo)
(0.1 %ꢁ200 fAꢁ1 fA ꢀ Vo)
(0.1 %ꢁ1 pAꢁ10 fA ꢀ Vo)
(0.05 %ꢁ20 pAꢁ100 fA ꢀ Vo)
(0.05 %ꢁ100 pAꢁ1 pA ꢀ Vo)
(0.04 %ꢁ2 nAꢁ10 pA ꢀ Vo)
100 V
100 V
100 V
100 V
100 V
100 V
100 V
(0.03 %ꢁ60 nAꢁ1 nA ꢀ Vo)
(0.03 %ꢁ200 nAꢁ10 nA ꢀ Vo)
10 mA
100 mA
100 V
4
(0.045 %ꢁ15 µAꢁ100 nA ꢀ Vo) (0.04 %ꢁ6 µAꢁ100 nA ꢀ Vo)
1. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.
2. Measurements made in the lower ranges can be greatly impacted by vibrations and shocks. These specifications assume an environment free of
these factors.
3. (% of read value ꢁ offset current (fiꢀed part determined by the output/measurement range ꢁ proportional part that is multiplied by Vo))
4. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps.
3
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