Voltage range, resolution, and accuracy (high speed ADC)
Voltage range
0.5 V
Force resolution
25 µV
Measure resolution
Force accuracy¹
(0.018 % ꢁ 150 µV)
(0.018 % ꢁ 400 µV)
(0.018 % ꢁ 750 µV)
(0.018 % ꢁ 3 mV)
(0.018 % ꢁ 6 mV)
(0.018 % ꢁ 15 mV)
Measure accuracy¹
(0.01 % ꢁ 250 µV)
(0.01 % ꢁ 700 µV)
(0.01 % ꢁ 2 mV)
(0.01 % ꢁ 4 mV)
(0.015 % ꢁ 8 mV)
(0.02 % ꢁ 20 mV)
Maximum current
0.5 µV
2 µV
100 mA
100 mA
100 mA
100 mA
²
2 V
5 V
100 µV
250 µV
1 mV
5 µV
20 V
40 V
100 V
20 µV
40 µV
100 µV
2 mV
5 mV
²
1. (% of read value ꢁ offset voltage V)
2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts.
Current range, resolution, and accuracy (high speed ADC)
SMU type
Current
Force
Measure
Force accuracy³
Measure accuracy³
Maximum
voltage
,
range
resolution resolution¹²
HRSMU w/ ASU
HRSMU
1 pA
10 pA
1 fA
5 fA
100 aA
(0.9 %ꢁ15 fA)
(1.8 %ꢁ12 fA)
(0.5 %ꢁ15 fAꢁ10 aA ꢀ Vo)
100 V
100 V
400 aA (with ASU) (0.46 %ꢁ30 fAꢁ10 aA ꢀ Vo)
1 fA (HRSMU)
100 pA
5 fA
500 aA (with ASU) (0.3 %ꢁ100 fAꢁ100 aA ꢀ Vo)
2 fA (HRSMU)
(0.5 %ꢁ40 fAꢁ100 aA ꢀ Vo)
100 V
MPSMU
1 nA
10 nA
100 nA
1 µA
10 µA
100 µA
1 mA
50 fA
500 fA
5 pA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
10 fA
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
(0.1 %ꢁ300 fAꢁ1 fA ꢀ Vo)
(0.1 %ꢁ3 pAꢁ10 fA ꢀ Vo)
(0.05 %ꢁ30 pAꢁ100 fA ꢀ Vo)
(0.05 %ꢁ300 pAꢁ1 pA ꢀ Vo)
(0.05 %ꢁ3 nAꢁ10 pA ꢀ Vo)
(0.035 %ꢁ15 nAꢁ100 pA ꢀ Vo) (0.05 %ꢁ20 nAꢁ100 pA ꢀ Vo)
(0.04 %ꢁ150 nAꢁ1 nA ꢀ Vo)
(0.04 %ꢁ1.5 µAꢁ10 nA ꢀ Vo)
(0.25 %ꢁ300 fAꢁ1 fA ꢀ Vo)
(0.25 %ꢁ2 pAꢁ10 fA ꢀ Vo)
(0.1 %ꢁ20 pAꢁ100 fA ꢀ Vo)
(0.1 %ꢁ200 pAꢁ1 pA ꢀ Vo)
(0.05 %ꢁ2 nAꢁ10 pA ꢀ Vo)
100 V
100 V
100 V
100 V
100 V
100 V
100 V
(0.04 %ꢁ200 nAꢁ1 nA ꢀ Vo)
(0.04 %ꢁ2 µAꢁ10 nA ꢀ Vo)
10 mA
100 mA
100 V
4
(0.045 %ꢁ15 µAꢁ100 nA ꢀ Vo) (0.1 %ꢁ20 µAꢁ100 nA ꢀ Vo)
1. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.
2. Measurements made in the lower ranges can be greatly impacted by vibrations and shocks. These specifications assume an environment free of
these factors.
3. (% of read value ꢁ offset current (fiꢀed part determined by the output/measurement range ꢁ proportional part that is multiplied by Vo))
4. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps.
MPSMU and HRSMU measurement and output range
Power consumption
Voltage source mode
Current (mA)
100
Voltage range
Power
0.5 V
2 V
5 V
20 ꢀ Ic (W)
20 ꢀ Ic (W)
20 ꢀ Ic (W)
20 ꢀ Ic (W)
40 ꢀ Ic (W)
50
20
20 V
40 V
100 V
100 ꢀ Ic (W)
Where Ic is the current compliance setting.
-100
-40 -20
20 40
100
-20
-50
Voltage (V)
Current source mode
Voltage compliance Power
Vc ≤ 20
20 < Vc ≤ 40
40 < Vc ≤ 100
Where Vc is the voltage compliance setting
and Io is output current.
20 ꢀ Io (W)
40 ꢀ Io (W)
100 ꢀ Io (W)
-100
4