• Multi-frequency capacitance measure-
ment unit (MFCMU) available
• High-voltage semiconductor pulse
generator unit (HV-SPGU) available
• Waveform generator/fast measurement
unit (WGFMU) available
• High-resolution, analog-to-digital
converter (ADC) available to all installed
SMUs
• High-speed ADC present on each
installed SMU
• SMU/AUX path switching supported on
the atto-sense and switch unit (ASU)
• SMU/MFCMU switching supported
using SMU CMU unify unit (SCUU) and
guard switch unit (GSWU)
• MFCMU automatically identifies
capacitance measurement accessories
• WGFMU/SMU path switching supported
on the remote-sense and switch unit
(RSU)
• GPIB port for instrument control
• Self-test, self-calibration, diagnostics
The measurement and output accuracy
are specified at the rear panel connector
terminals when referenced to the Zero
Check terminal. The B1530A WGFMU
measurement and output accuracy are
specified at the output terminal of the RSU.
Accuracy is specified under the following
conditions:
Basic Features
• PC-based instrument with touch screen
interface; optional USB keyboard and
mouse available
• EasyEXPERT software with over 200
categorized application tests supplied
with the instrument
• Performs current versus voltage (IV)
measurements
• Performs capacitance versus voltage
(CV), capacitance versus time (Ct)
and capacitance versus frequency (Cf)
measurements
• Performs quasi-static CV (QSCV)
measurements
• High voltage pulse forcing up to 40 V
with ALWG and voltage monitor
capabilities.
• Performs fast IV measurement synchro-
nized with the applied waveforms for
accurate transient IV or time-domain
measurements
• Front-panel Classic Test measurement
modes supported: single-channel sweep,
multi-channel sweep, time sampling,
list sweep, CV sweep and direct control
(GPIB FLEX)
• GUI-based control of the Agilent
B2200A, and B2201A switching matrices
• Modular mainframe with ten module
slots and one 4.2 A ground unit
• Multiple source/monitor unit (SMU)
types available: medium power
(MPSMU), high-power (HPSMU), and
high-resolution (HRSMU)
1. Temperature: 23 °C 5 °C
2. Humidity: 20 % to 60 %
3. After 40 minute warm-up followed by
self-calibration
4. Ambient temperature change less than
1 °C after self-calibration eꢀecution,
not applicable for MFCMU and WGFMU
5. Measurement made within one hour
after self-calibration eꢀecution, not
applicable for MFCMU and WGFMU
6. Calibration period: 1 year
7. SMU integration time setting:
1 PLC (1 nA to 1A range, voltage range)
20 PLC (100 pA range)
50 PLC (1 pA to 10 pA range)
Averaging of high-speed ADC:
128 samples per 1 PLC
8. SMU filter: ON (for SMUs)
9. SMU measurement terminal connection:
Kelvin connection
Specification conditions
This document lists specifications and
supplemental information for the B1500A
and its associated modules. The specifica-
tions are the standards against which the
B1500A and its associated modules are
tested. When the B1500A and any of its
associated modules are shipped from the
factory, they meet the specifications. The
“supplemental” information and “typical”
entries in the following specifications are
not warranted, but provide useful informa-
tion about the functions and performance
of the instrument.
10. WGFMU load capacitance: 25 pF or less
Note: Agilent Technologies is responsible
for removing, installing, and replacing the
B1500A modules. Contact your nearest
Agilent Technologies to install and
calibrate the B1500A modules
B1500A specification
Supported plug-in modules
The B1500A supports ten slots for plug-in modules.
Part
Description
Slots
Range of operation
Measure
number
occupied
resolution
2 µV, 10 fA
B1510A High power source/monitor unit (HPSMU)
2
1
1
—
1
1
-200 V to 200 V, -1 A to 1 A
B1511A Medium power source/monitor unit (MPSMU)
B1517A High resolution source/monitor unit (HRSMU)
E5288A¹ Atto-sense and switch unit (ASU)
B1520A Multi frequency capacitance measurement unit (MFCMU)
B1525A High voltage semiconductor pulse generator unit (HV-SPGU)
B1530A Waveform generator/fast measurement unit (WGFMU)
-100 V to 100 V, -100 mA to 100 mA 0.5 µV, 10 fA
-100 V to 100 V, -100 mA to 100 mA 0.5 µV, 1 fA
-100 V to 100 V, -100 mA to 100 mA 0.5 µV, 100 aA
1 kHz to 5 MHz
40 V (80 Vp-p)
PG Mode: -3 V to 3 V, -5 V to 5 V
Fast IV Mode: -3 V to 3 V, -5 V to
5 V, 0 V to 10 V, -10 V to 0 V
0.035 fFrms²
50 μV
1
0.014 % of the
range 3
1. This is connected with the B1517A high resolution SMU.
2. Dispersion of measurement values when connecting a DUT 10 pF to the measurement terminals under the measurement condition of frequency
1 MHz, signal level 250 mVac, and measurement time 1 PLC. The display resolution is 0.000001 fF at 1 fF order by 6 digits display.
3. Display resolution
2
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