SPM 401
Piezoresistive Silicon Pressure
Sensor
Calibrated and compensated
With media separation
Vacuum resistant
O- ring mounting
Pressure ranges: 1.5 to 100 psi
Applications
- Industrial
- Vacuum technology
- Pneumatic and hydraulic components (e.g. valves, pumps)
- Level measuring (e.g. environmental technology)
Specifications
All parameters are measured at supply current of 1 mA reference conditions unless otherwise specified
Standard Pressure Ranges
PSI1)
bar
Output signal (Offset) Output signal (Span)
Proof pressure Negative pressure
[PSI1)/bar] [PSI1)/bar]
Burst pressure
[PSI1)/bar]
[mV]
[mV]
min.
-2
typ.
0
max.
min.
14
typ.
33
max.
60
1.5
3
5
15
30
50
100
0.1
0.2
0.35
1
2
3.5
7
15
30
30
1
2
2
-15
-1
-1
-1
-1
-1
-1
-1
22
45
45
112
225
375
750
≥ 1.5
≥ 3
≥ 3
≥ 7.5
≥ 15
≥ 25
≥ 50
2
2
-15
-15
-15
-15
-15
-15
-2
0
50
75
100
75
5
150
250
500
10
17.5
35
-2
0
2
80
130
180
Supply / Performance
min.
-
-
typ.
1
-
max.
3
10
Supply current
Supply voltage
[mA]
[V]
Linearity
Hysteresis
[% FSO BFSL]
[%FS0]
- 0.25
- 0.05
0.25
0.05
0.1
0.02
Input impedance
Output impedance
Insulation resistance
Rise time (10 to 90 %)
[kΩ] pn ≤ 3 psi : 2.7 to 4.0
[kΩ] pn ≤ 3 psi: 2.7 to 4.0
[MΩ] 50 (between housing and sensor chip) @ 50 VDC
[ms] ≤ 0.1
pn > 3 psi: 4.0 to 6.0
pn > 3 psi: 4.0 to 6.0
1)
PSI values around rounded and for reference only
DS-0343 Rev A
Tel: 408.225.4314
Fax: 408.225.2079
www.allsensors.com
info@allsensors.com
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