Datasheet > S-ABBAB-6MJ01

S-ABBAB-6MJ01

更新时间： 2024-11-30 01:24:51

品牌	Logo	应用领域
泰艺 - TAITIEN		/
页数	文件大小	规格书
1页	85K
描述
Quartz Thickness â Monitor Crystal

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中文翻译

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数据手册

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S-ABBAB-6MJ01 数据手册

S-ABBAB-6MJ01

QuartzThickness–MonitorCrystal

FEATURE

– Quartz thickness sensor for high-stress material depositions

– Alloy-Electrode

– Frequency: 6 MHz

– Dielectrics on semiconductor

– High-stress metal depositions: SiO、SiO2、MgF2、TiO2

– Compatible with Inficon™ type quartz crystal

THICKNESS SENSOR SPECIFICATION

Sensor Material

Cut

pure z Quartz

Mode

Fundamental

plano-convex

13.98 ± 0.03 mm

Alloy

Contour

Diameter

Electrode

5.980~5.992 MHz @ 25℃

15 ohms Max

+25℃~+75℃

-20℃~+85℃

RH30%~50%

10 crystals / disc

Resonant Frequency

Resistance at Resonance

Operation Temperature

Storage Temperature

Storage Humidity

Packing

Rev(1)01/2013

Specifications subject to change without notice

www.taitien.com

sales@taitien.com.tw

中文翻译

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