Datasheet > MTX1-50G

MTX1-50G

更新时间： 2024-02-14 16:15:43

品牌	Logo	应用领域
JLWORLD		/
页数	文件大小	规格书
4页	1266K
描述
Single Axis Acce lerometer - 50 g

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数据手册

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MTX1-50G 数据手册

1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong

Tel : (+852) 2565 6979

Email : sales@jlworld.com

Website : www.jlworld.com

Fax : (+852) 2565 0319

Page 1 of 4

060472-A2

MTX1-50G

Single Axis Accelerometer – 50 g

Single Axis Silicon Accelerometer Die

The MTX1-50G

series

capacitive silicon

accelerometer sensors are manufactured in class

10 clean room using state of the art CMOS and

bulk micro-machining capabilities. They are

manufactured in six inched wafers, utilizing DRIE

techniques and patented processes.

An applied force or acceleration (including gravity)

causes a capacitance shift in a differential

capacitor, which is converted to a pulse density

modulation by an integrated ASIC. The sensing

element is a differential capacitor fabricated in

single crystal silicon with a high aspect ratio

thereby offering excellent performance in

sensitivity and linearity.

The sensing element is enclosed in a hermetic

wafer-level package using wafer to wafer bonding.

This allows it to be assembled in different types of

packaging including low cost over-molded plastic

packages.

Dies are fully probed and inspected and can be

shipped in waffle pack.

THE MAIN FIELD OF APPLICATIONS

FEATURES

•

Excellent accuracy over 50g range

Good temperature performance

Low cost design

ꢀ Acceleration Measurement

ꢀ Vibration measurement

ꢀ Inclination Measurement

Capacitive, high performance

100% factory tested

High volume manufacturing

Patented process

Document #: DS-SDEV-MTX1-50G Rev A

12 3 4

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