19-3267; Rev 6; 11/09
Dual Per-Pin Parametric
Measurement Units
1/MAX952
General Description
Features
o Force Voltage/Measure Current (FVMI)
o Force Current/Measure Voltage (FIMV)
o Force Voltage/Measure Voltage (FVMV)
o Force Current/Measure Current (FIMI)
o Force Nothing/Measure Voltage (FNMV)
The MAX9951/MAX9952 dual parametric measurement
units (PMUs) feature a small package size, wide force and
measurement range, and high accuracy, making the
devices ideal for automatic test equipment (ATE) and other
instrumentation that requires a PMU per pin or per site.
The MAX9951/MAX9952 force or measure voltages in the
-2V to +7V through -7V to +13V ranges, dependent upon
o Force Nothing/Measure Current (FNMI,
Range E Only)
the supply voltage (V
and V ). The devices handle
EE
CC
o Termination/Measure Current
o Termination/Measure Voltage
o Five Programmable Current Ranges
supply voltages of up to +30V (V
to V ) and a 20V
EE
CC
device-under-test (DUT) voltage swing at full current. The
MAX9951/MAX9952 also force or measure currents up to
±±6mA with a lowest full-scale range of ±2ꢀA. ꢁntegrated
support circuitry facilitates use of an external buffer ampli-
fier for current ranges greater than ±±6mA.
±±20µ
±±20µ
±±220µ
±±mµ
A voltage proportional to the measured output voltage
or current is provided at the MSR_ output. ꢁntegrated
comparators, with externally set voltage thresholds,
provide detection for both voltage and current levels.
The MSR_ and comparator outputs can be placed in a
high-impedance state. Separate FORCE and SENSE
connections are short-circuit protected for voltages
±ꢀ6mµ
o -±V to +7V Through -7V to +13V Input-Voltage
Range
o Force-Current/Measure-Current µdjustable-
Voltage Offset (IOS)
o Programmable Voltage Clamps at Force Output
from (V - 0.3V) to (V
+ 0.3V). The FORCE output
CC
also features a low-leakage, high-impedance state.
o Low-Leakage, High-Impedance Measure, and
EE
Force States
o 3-Wire Serial Interface
o Low ꢀmµ (max) Quiescent Current per PMU
ꢁntegrated voltage clamps limit the force output to lev-
els set externally. The force-current or the measure-cur-
rent voltage can be offset -0.2V to +6.6V (ꢁOS). This
feature allows for the centering of the control or mea-
sured signal within the external DAC or ADC range.
Ordering Information
PµRT
TEMP RµNGE
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
0°C to +70°C
PIN-PµCKµGE
±6 TQFP-EPR*
±6 TQFP-EPR*
±6 TQFP-EPR*
±6 TQFP-EPR*
±6 TQFP-EPR*
±6 TQFP-EPR*
±6 TQFP-EPR*
±6 TQFP-EPR*
±6 TQFP-EP**
±6 TQFP-EP**
±6 TQFP-EP**
±6 TQFP-EP**
±6 TQFP-EP**
±6 TQFP-EP**
±6 TQFP-EP**
±6 TQFP-EP**
MµX9951DCCB+D
MAX9951DCCB+TD
MAX9951DCCB-D
MAX9951DCCB-TD
MAX9951FCCB+
MAX9951FCCB+T
MAX9951FCCB-D
MAX9951FCCB-TD
MµX995±DCCB+
MAX9952DCCB+T
MAX9952DCCB-D
MAX9952DCCB-TD
MAX9952FCCB+
MAX9952FCCB+T
MAX9952FCCB-D
MAX9952FCCB-TD
The MAX9951D/MAX9952D feature an integrated 10kΩ
force-sense resistor between FORCE_ and SENSE_.
The MAX9951F/MAX9952F have no internal force-sense
resistor. These devices are available in a ±6-pin, 10mm
x 10mm, 0.5mm pitch TQFP package with an exposed
8mm x 8mm die pad on the top (MAX9951) or the bot-
tom (MAX9952) of the package for efficient heat
removal. The exposed pad is internally connected to
V
. The MAX9951/MAX9952 are specified over the
EE
commercial 0°C to +70°C temperature range.
Applications
Memory Testers
VLSꢁ Testers
System-on-a-Chip Testers
Structural Testers
+Denotes a lead(Pb)-free/RoHS-compliant package.
-Denotes a package containing lead(Pb).
Pin Configurations and Selector Guide appear at end of
data sheet.
D = Dry pack.
*EPR = Top side exposed pad.
**EP = Exposed pad.
T = Tape and reel.
________________________________________________________________ Maxim Integrated Products
1
For pricing, delivery, and ordering information, please contact Maxim Direct at 1-888-ꢀ±9-6ꢀ6±,
or visit Maxim’s website at www.maxim-ic.com.