Datasheet > F3M-S826

F3M-S826

更新时间： 2024-11-25 01:01:19

品牌	Logo	应用领域
欧姆龙 - OMRON		/
页数	文件大小	规格书
7页	316K
描述
Silicon Wafer Mapping Sensor

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中文翻译

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数据手册

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F3M-S826 数据手册

Silicon Wafer Mapping Sensor

F3M-S

Allows Simultaneous Mapping of up

to 25 Silicon Wafers

H Economical, one sensor detects most

wafer types, including dummy wafers

H Models match wafer sizes of 300 mm,

200 mm and 150 mm

H Automatic and remote teaching

capability

H Self-diagnostic functions reduce

downtime

Ordering Information

Applicable wafer size

Number of cassette slots

Function

Remarks

Part number

F3M-S625

F3M-S626

F3M-S825

F3M-S826

F3M-S1213

F3M-S1225

6 inches (4.76-mm pitch)

Self-diagnosis

---

8 inches (6.35-mm pitch)

12 inches (10-mm pitch)

Self-diagnosis

---

Self-diagnosis

CE marking

Application Examples

Detects Transparent Glass Wafers

with a Transparency of 92%

(F3M-S6j and F3M-S8j)

Answer-back Alarms for Setting Errors and

Self-diagnostic Alarms for Operation Errors

These alarms help reduce system downtime and shorten

The F3M-S allows the mapping of cassettes that have both

silicon wafers and glass wafers. The F3M-S also accurately

detects dummy wafers in the carrier used to test coating or

processing tolerances.

troubleshooting time.

Note: The self-diagnostic output function is not incorporated by

the F3M-S826/-S626.

Static Electricity Protection

Automatic Teaching Saves Setting Time

Remote Teaching Available

The F3M-S has an automatic teaching function that ensures easy

adjustments within a minimal time. The remote teaching function

allows quick, on-the-fly set up.

OMRON’s optical system, including an emitter and receiver,

prevents Sensor malfunction and damage by protecting the

Sensor from static electricity that may be charged on

semiconductor wafers at the time of mapping.

12 3 4 5 6 7

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