Datasheet ESRF-ESF
Resistive MEMS Gas Flow Sensor
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State of the art performance due to MEMS resistive technology
High accuracy and resolution
<±1.25% RD Total Error Band
Wide dynamic range
Bidirectional Flow Measurement
Gas Flow sensor: up to ±300 ln/min
Temperature compensation: 0oC to +50oC
Calibrated & temperature compensated analog or digital output
Excellent long term stability
Low temperature drift
Compact size
Product Summary
ES Systems has developed ESRF-ESF, an inline gas flow sensor, based on the hot-film
anemometer principle for mass gas flow measurements.
ESRF-ESF is one of the few gas flow sensors featuring bidirectional gas flow sensing of up to
±300 ln/min with a total error band of <±1.25% RD. ESRF-ESF gas flow sensors provide
calibrated and temperature compensated output on an SPI, I2C bus or analog output making
them plug & play for direct interfacing to low voltage MCUs and systems. The user is provided
with a multitude of interface and output options so that the right sensor configuration can be
selected based on the specific requirements for each application.
Calibration gas is air but other non-aggressive gases are available upon request.
Typical Applications
Medical
Ventilation • Anesthesia • Inspiratory flow sensing • Gas mixing • Respiratory measurements •
Drug delivery • Expiratory flow measurement • Metabolic Measurements • Proximal Flow
measurement • Proximal flow measurement for infants / neonates • Expiratory flow
measurement for infants / neonates • Ventilation & Anesthesia for infants / neonates •
Respiratory measurements for infants / neonates • Metabolic Measurements for infants /
neonates • Oxygen concentrators and conservers • Respirators and ventilators • Nebulizers •
Continuous positive airway pressure (CPAP) • Anesthesia machines • Anesthesia delivery
machines, ventilators • ventricular assist devices (heart pumps), spirometers • laparoscopy
Industrial
Mass flow controllers (Telecommunication systems, Environmental climate controls, Fuel cell
controls, Process gas control welding equipment and lasers) • Analytic instrumentation
(spectrometry, chromatography) • Air-to-fuel ratio • Fuel cells • Fume hoods • Gas leak
detection • Process control gas monitoring • Vacuum pump monitoring • Clogging detection •
Flow measurement • Air volume measurement • Process automation • Burner control •
Environment monitoring • Laboratory
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