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AN884

更新时间： 2024-11-27 22:39:11

品牌	Logo	应用领域
美信 - MAXIM		传感器温度补偿电子
页数	文件大小	规格书
6页	277K
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Miniature Flow Sensor Has Electronic Temperature Compensation

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AN884 数据手册

SENSOR SIGNAL CONDITIONERS

Application Note 884: Dec 13, 2001

Miniature Flow Sensor Has Electronic Temperature Compensation

Fluid analysis is essential in a wide range of current applications. Biology, medical

analysis, genetic engineering, and many other fields rely on fast, precise, and

reproducible chemical and biological analyses. Tools that automate the dosing and

analysis of fluid samples are essential for affordable performance.

Highly specialized electronic sensors have been designed to automate sample analysis, but the

dosing of liquids – still a prominent issue – must be done physically. This operation is usually

accomplished with specialized micro-syringes driven by stepper motors. It's easy to imagine the

difficulty and expense associated with such setups.

In a novel approach to this problem, DASA IMT and Seyonic SA (both of Neuchâtel,

Switzerland) developed flow-through micro-fluidic dosing as part of a toolkit for experiments

performed in space. As described in the following, a key element of that design was a micro-

flow sensor device. Requirements were:

Small size

Chemical inertia

Temperature stability

Long-term stability

Simple, easy, and fully automated recalibration

Linear voltage-versus-pressure output

One way to measure micro-fluidic flow is by measuring the pressure difference across a

restriction integrated into a micro-flow channel. Pressure measurements are performed with

dual piezo-resistive pressure sensors, one placed before the restriction and the other behind.

To insure that the sensor is not affected or altered by chemically aggressive fluids, the fluid

under pressure is applied to the back of the sensor diaphragm (whose monocrystal-line silicon

is relatively insensitive to the chemicals) rather than the front. This unusual configuration

protects sensitive microelectronic circuits on top of the sensor by shielding them from the

liquid. To prevent error from mechanical-tension forces, the sensor is mounted on a thick

ceramic substrate (Figure 1).

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