MEMS Differential Pressure Sensor
D6F-PH
A Compact, High-accuracy Differential
Pressure Sensor with Superior
Resistance to Environments.
• High accuracy of ±±3 R.D.
• Linearized and temperature compensated
• Digital output (I2C communication)
• High flow impedance to reduce the influence of bypass
configuration
• RoHS Compliant
Ordering Information
Measurement Range
0 to 250 Pa (0 to 1 in. H2O)
-50 to +50 Pa (± 0.2 in. H2O)
-500 to +500 Pa (± 2 in. H2O)
Applicable Fluid
Model
D6F-PH0025AD1
D6F-PH0505AD3
D6F-PH5050AD3
Air
Note: The Sensor can be calibrated for different gas types. Consult Omron.
Characteristics
Model
D6F-PH0025AD1
D6F-PH0505AD3
D6F-PH5050AD3
± 500 Pa
Measurement Range (See Note 1)
Calibration Gas (See Note 2)
Port Type
0 to 250 Pa
± 50 Pa
Air
Barb joint, Maximum outside diameter: 4.9mm
2.± to ±.6 VDC
Power Supply
Current Consumption
Resolution
6 mA max. with no load and VCC of ±.± V, GND=0 VDC, 25°C
12 bit
Zero Point Tolerance (See Note 4)
Span Tolerance (See Note 4)
Temperature Compensation
± 0.2 Pa
± ±3 R.D.
Yes
Span shift due to Temperature Variation
Response Time
± 0.53 R.D. per 10°C
25 ms typical at 12 bit resolution (50 ms max). The processing time is 6 ms typical at 12 bit resolution.
Gas Flow through Sensor (See Note 3)
Interface
≤ 6± mL/min
≤ 2± mL/min
≤ 100 mL/min
I2C
Case Material
PPS
Degree of Protection
Withstand Pressure
Operating Temperature
Operating Humidity
Storage Temperature
Storage Humidity
IEC IP40
10 kPa
-20 to 80°C (with no condensation or icing)
±5 to 853 RH (with no condensation or icing)
-40 to 80°C (with no condensation or icing)
±5 to 853 RH (with no condensation or icing)
Insulation Resistance
Dielectric Strength
Weight
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
5.2 g
Note: 1. At standard atmospheric pressure (101±.25 hPa).
2. Dry gas must not contain large particles, e.g., dust, oil or mist.
3. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure. Typical characteristic of air flow
by differential pressure is shown in the “Engineering Data” section.
4. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation.
MEMS Differential Pressure Sensor D6F-PH
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