MEMS Mass Flow Sensor
D6F-P
A Compact, High-performance Flow
Sensor with Dust Segregation Structure.
• Built in Dust Segregation System (DSS) with cyclone flow
structure, diverts particulates from sensor element.
• High resolution and repeatability, even at low flow rates.
• Barbed ports with connector or PCB terminals, or manifold
mount with connector versions.
• Built in voltage regulator, temperature compensation and
amplified output. Measure up to 200 LPM with a bypass setup.
• Alternative to differential pressure sensing.
• RoHS Compliant
Ordering Information
Description
Case
Calibration Gas Flow Range
(See note 1.)
Mounting
Method
Connection
Model
Flow Sensor
PBT
Air (See note 2.)
0-0.1 LPM
0-1 LPM
Flange mount
PCB terminals D6F-P0001A1
D6F-P0010A1
Connector
Manifold mount Connector
- - - - - -
D6F-P0010A2
D6F-P0010AM2
D6F-CABLE2
Cable Connector Assembly
- - -
- - -
- - -
Note: 1. Can be calibrated for different gas types. Consult your Omron representative.
2. Dry gas must not contain large particles, eg dust, oil, mist.
3. Cable Assembly “D6F-CABLE2”, used with D6F-P0010A2 and D6F-P0010AM2, is sold separately.
Specifications
■ Characteristics
Models
D6F-P0001A1
0 to 0.1 L/min.
Air
barbed fitting maximum outside dia. 4.9 mm
Lead terminal
D6F-P0010A1
0 to 1 L/min.
D6F-P0010A2
D6F-P0010AM2
Flow Range (See note 1.)
Calibration Gas (See note 2.)
Flow Port Type
manifold mount
Electrical Connection
Connector (3 wire)
Power Supply
4.75 to 9.45 VDC
Current Consumption
Operating Output Voltage
Output Voltage Limits (Min and Max.)
Accuracy and Temperature Characteristics
Repeatability (Reference (typical))
Case Material
Max. 15 mA (no load, Vcc = 5 VDC)
0.5 to 2.5 VDC
0 VDC min. and 3.1 VDC max. (Lead resistance 10 kΩ)
5% F.S. max. of detected characteristics at 25 C, within -10 to 60 °C (typical test results within ±2% F.S.)
±
°
± 1.0% F.S.
PBT
± 0.4% F.S.
Degree of Protection
IP40
Withstand Pressure
Pressure Drop (Reference (typical))
Operating Temperature
50 kPa (7 psi)
0.19 kPa
0.48 kPa
-10 to 60°C (1 LPM versions) and -33 to 75°C (0.1 LPM version) with no icing or condensation
(Storage: -40 to 80°C with no icing or condensation)
Operating Humidity
Insulation Resistance
Dielectric Strength
35 to 85% RH with no icing or condensation (Storage: 35 to 85% RH with no icing or condensation)
20 MΩ (500 VDC between lead terminal and the case)
500 VAC, 50/60 Hz for 1 minute. (Leakage current typ. Max. 1mA) between lead terminals and case.
Weight
8.5 g
8.0 g
Response Time (Reference (typical))
150 msec
Note: 1. Mass flow converted into volumetric flow rate, SLM (standard liters per minute) at 0°C, 1 atmosphere.
2. Dry gas. (must not contain large particles, dust, oil, mist)
MEMS Mass Flow Sensor D6F-P
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