Agilent TwisTorr 84FS Split Flow
Datasheet
Side Port Pumping Speed
Main Port Pumping Speed
60,0
50,0
40,0
30,0
4
3,5
3
2,5
2
1,5
1
20,0
Nitrogen
Nitorgen
Helium
Argon
Helium
10,0
Argon
0,5
0,0
1,00E-08
0
1,00E-07
1,00E-06
1,00E-05
1,00E-04
1,00E-03
1,00E-02
1,00E-01
1,00E+00
1,00E-03
1,00E-02
1,00E-01
1,00E+00
Side Port Pressure (mbar)
Main Port Pressure (mbar)
Main/Side Port Compression Ratio
Main Port vs Foreline Compression Ratio
1,0E+11
1,0E+10
1,0E+09
1,0E+08
1,0E+07
1,0E+06
1,0E+05
1,0E+04
1,0E+06
1,0E+05
1,0E+04
1,0E+03
1,0E+02
Main Port Nitrogen
1,0E+03
Nitrogen
Helium
Argon
1,0E+01
1,0E+02
1,0E+01
1,0E+00
Main Port Helium
Main Port Argon
1,0E+00
1,0E-03
1,0E-02
1,0E-01
1,0E+00
1,0E-02
1,0E-01
1,0E+00
1,0E+01
1,0E+02
Side Port Pressure (mbar)
Foreline Pressure (mbar)
Side Port vs Foreline Compression Ratio
1,0E+06
1,0E+05
1,0E+04
1,0E+03
1,0E+02
Side Port Nitrogen
Side Port Helium
1,0E+01
Side Port Argon
1,0E+00
1,0E-02
1,0E-01
1,0E+00
1,0E+01
1,0E+02
Foreline Pressure (mbar)