Pressure
On-Chip Temperature Compensation and Calibration
40
35
30
25
20
15
10
5
VS = 10 VDC
TA = 25°C
P1 > P2
TYP
Span
Range
(TYP)
MAX
MIN
0
-5
Offset
(TYP)
kPa
PSI
0
25
50
7.25
75
100 125
14.5
Pressure
150
21.75
175 200
29
Figure 2. Output vs. Pressure Differential
Figure 2 shows the output characteristics of the MPX2200
series at 25°C. The output is directly proportional to the
differential pressure and is essentially a straight line.
The effects of temperature on full scale span and offset are
very small and are shown under Operating Characteristics.
Absolute
Die
Differential/Gauge
Silicone Gel
Stainless Steel
Metal Cover
Silicone Gel
Die Coat
Die
Stainless Steel
Metal Cover
Die Coat
P1
P1
Epoxy
Case
Epoxy
Case
Wire Bond
Wire Bond
Lead Frame
Bond
Die
Lead Frame
Differential/Gauge Element
P2
Die
Bond
Absolute Element
P2
Figure 3. Cross Sectional Diagram (not to scale)
Figure 3 illustrates the differential/gauge die in the basic
chip carrier (Case 344). A silicone gel isolates the die surface
and wire bonds from the environment, while allowing the
pressure signal to be transmitted to the silicon diaphragm.
The MPX2200 series pressure sensor operating
characteristics and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media
other than dry air may have adverse effects on sensor
performance and long term reliability. Contact the factory for
information regarding media compatibility in your application.
Least
Square
Deviation
Least Squares Fit
Exaggerated
Performance
Curve
Straight Line
Deviation
LINEARITY
End Point Straight
Line Fit
Linearity refers to how well a transducer's output follows
the equation: VOUT = VOFF + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 4) or
(2) a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user.
Freescale’s specified pressure sensor linearities are based
on the end point straight line method measured at the
midrange pressure.
Offset
50
100
0
Pressure (% Full Scale)
Figure 4. Linearity Specification Comparison
MPX2200
Sensors
Freescale Semiconductor
4