LINEARITY
Linearity refers to how well a transducer's output follows
the equation: VOUT = VOFF + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives the
“best case” linearity error (lower numerical value), the
calculations required are burdensome.
Least Squares Fit
Least
Square
Deviation
Exaggerated
Performance
Curve
Straight Line
Deviation
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user.
Freescale’s specified pressure sensor linearities are based
on the end point straight line method measured at the
midrange pressure.
End Point Straight
Line Fit
Offset
50
100
0
Pressure (% Fullscale)
Figure 2. Linearity Specification Comparison
ON-CHIP TEMPERATURE COMPENSATION AND CALIBRATION
Figure 3 shows the output characteristics of the MPX2102/
The effects of temperature on Full Scale Span and Offset
are very small and are shown under Operating
Characteristics.
MPXV2102G series at 25°C. The output is directly
proportional to the differential pressure and is essentially a
straight line.
VS = 10 VDC
40
TA = 25°C
MPX2102
35
30
25
20
15
10
5
TYP
P1 > P2
Span
Range
(TYP)
MAX
MIN
0
-5
Offset
(TYP)
kPa
PSI
0
25
3.62
50
7.25
75
10.88
100
14.5
Figure 3. Output vs. Pressure Differential
Differential/Gauge
Die
Absolute
Die
Stainless Steel
Metal Cover
Silcone Gel
Die Coat
Silicone Gel
Die Coat
Stainless Steel
Metal Cover
P1
P1
Epoxy
Case
Epoxy
Case
Wire Bond
Wire Bond
Lead Frame
Bond
Die
Lead Frame
Die
Bond
Absolute Element
P2
Differential/GaugeElement
P2
Figure 4. Cross Sectional Diagrams (Not to Scale)
Figure 4 illustrates the absolute sensing configuration
(right) and the differential or gauge configuration in the basic
chip carrier (Case 344). A silicone gel isolates the die surface
and wire bonds from the environment, while allowing the
pressure signal to be transmitted to the silicon diaphragm.
The MPX2102/MPXV2102G series pressure sensor
operating characteristics and internal reliability and
qualification tests are based on use of dry air as the pressure
media. Media other than dry air may have adverse effects on
sensor performance and long term reliability. Contact the
factory for information regarding media compatibility in your
application.
MPX2102
Sensors
4
Freescale Semiconductor