Pressure sensors
C32 series
B58601E32**B615/…B646
Gauge low pressure sensor die C32/1 (open bridge)
13)
Sensitivity S
The sensitivity is defined for a bridge voltage power supply VDD = 5 V. It can be determined by the formula:
(
)
Vꢍut pꢎ ꢏꢐꢑ − Vꢍ
S =
pꢎ ꢏꢐꢑ
This parameter is tested for process control on samples, mounted in TDK Sensors standard transducer package.
14)
Nonlinearity L
This parameter may be influenced by assembly.
The nonlinearity is measured using the endpoint method. Assuming a characteristic, this can be approximated
by a polynomial of second order, where the maximum is at px = prmax/2. The nonlinearity is defined at px = prmax/2,
using the equation:
( )
Vꢍut pꢑ − Vꢍ
pꢑ
L =
−
(
)
Vꢍut pꢎ ꢏꢐꢑ − Vꢍ pꢎ ꢏꢐꢑ
This parameter is tested for process control on samples, mounted in TDK Sensors standard transducer package.
15)
Temperature coefficient of sensitivity S and S:
These parameters may be influenced by assembly.
The temperature coefficients of sensitivity are tested for design verification on samples, mounted in TDK Sensors
standard transducer package over the temperature range Ta,min to T a,max with TR = 25 °C.
The temperature coefficients of first and second order are defined with the polynomial:
( )
)ꢁ]
S T = S T = 25°C 1 + αꢒ T − 25°C + βꢒ T − 25°C
(
)[
(
)
(
The coefficients S and S are calculated using the three measurement points of S(T) at Ta,min, TR and Ta,max
Pressure hysteresis pHys
.
16)
The pressure hysteresis is the difference between output voltages at constant pressure and constant temperature while
applying a pressure cycle with pressure steps of pr, min, p1, p2, p3, pr,max, p3, p2, p1, pr, min
:
( )
( )
Vꢍut,ꢁ pk − Vꢍut,ꢃ pk
pHys
=
FS
With k = min, 1, 2, 3, max. The pressure steps are: prmin = 0, p1 = 0.25·pr,max, p2 = 0.5·pr,max, p3 = 0.75·pr, max, pr,max
.
This parameter is tested for design verification on samples, mounted in TDK Sensors standard transducer package.
Since the pHys depends on several assembling conditions, this parameter has to be verified by the customer with his
assembling possibilities.
17)
Reliability data
For long-term stability of offset voltage LTSV0 please refer to the defined TDK Sensors standard AS100001 in chapter
“Long term stability parameter” on the internet. Since the LTSV0 depends on several assembling conditions, this
parameter has to be verified by the customer with his assembling possibilities.
TPS PRS SD PD
2021-03-08
Please read Cautions and warnings and
Page 6 of 10
Important notes at the end of this document.