SILICON
SM5812/SM5852
MICROSTRUCTURES
I N C O R P O R A T E D
CHARACTERISTICS FOR SM5812/SM5852 – SPECIFICATIONS
All parameters are measured at room temperature while applying 5.000V supply, unless otherwise specified.
Absolute1, Gage & Single2
Differential
TYP
MIN
TYP
MAX
MIN
MAX
UNITS
V
V
NOTES
Zero output (absolute and gauge)
Zero output (differential)
Output Span
0.42
0.50
0.58
3
3
3, 4
3, 4
5
2.42
1.96
1.90
-0.5
-2.5
-0.1
-0.3
-1.0
-2.5
-1.0
-2.0
-0.1
2
2.50
2.00
2.00
2.58
2.04
2.10
+0.5
+2.5
+0.1
+0.3
+1.0
+2.5
+1.0
+2.0
+0.1
3.92
3.80
-0.5
-2.5
-0.1
-0.3
-1.0
-2.5
-1.0
-2.0
-0.1
2
4.00
4.00
4.08
4.20
+0.5
+2.5
+0.1
+0.3
+1.0
+2.5
+1.0
+2.0
+0.1
V FS
V FS
%FS
%FS
%FS
%FS
%FS
%FS
%FS
%FS
%FS
msec
V
0.15 PSI
Linearity
0.15 PSI
5
Pressure hysteresis
5812
5852
Temperature coefficient - Zero
0.15 PSI
Temperature coefficient – Span
0.15 PSI
Thermal hysteresis
Response Time
Supply voltage
4.75
5.00
5.25
10
4.75
5.00
5.25
10
3, 7
Current consumption
Overpressure
mA
5812
5852
3X
15X
-40
0
3X
15X
-40
0
%FS
%FS
°C
6
6
Operating temperature range
25
25
25
+125
+70
+135
25
25
25
+125
+70
Compensated temperature range
Storage temperature range
Media compatibility
°C
-55
-55
+135
°C
8
Weight
3
3
gram
Notes:
1. Absolute parts are only offered in the SM5812 Series.
2. Single-ended parts (Pressure Type - S) have 2 ports and are for higher gain differential applications where the
differential pressure is always positive.
3. Sensor output is ratiometric to supply.
4. Full-scale (FS) is defined as zero pressure to rated pressure; differential parts can be used ±FS. Absolute and Gauge
zero output is 0.5 V typical and full-scale output is 4.5 V. Span is the difference between Full-scale output and zero
output, (4 V). For Differential parts, the negative full-scale is typically at 0.5 V, zero is typically 2.5 V, and positive full-
scale is 4.5 volts to give a span of 2.0 V.
5. Defined as best fit straight line for positive pressure applied to the part
6. Or 225 PSI, whichever is less. Output amplifier will saturate at about 0.25 V for applied pressure below the rated Zero
and at about 4.75 V for applied pressure above the rated Full-scale.
7. A 100 nF filter capacitor must be placed between Vsupply and Ground.
8. Clean, dry gas compatible with wetted materials. Wetted materials include Pyrex glass, silicon, alumina ceramic, epoxy,
RTV, gold, aluminum, and nickel.
Rev 1.4 6_05
2005 SMI
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 ♦ USA
Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@si-micro.com ♦ www.si-micro.com
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