CCD image sensor
S9037/S9038 series
High-speed operation, back-thinned FFT-CCD
The S9037/S9038 series FFT-CCD image sensors were developed for high-speed line scan cameras. Since an on-chip ampli-
fier having a wide bandwidth is used to an image sensor, a pixel rate of 10 MHz can be obtained. The S9037/S9038 series
image sensors also deliver a high line scan rate equivalent to interline CCD sensors when used in line binning operation
mode, because they have an active area pixel format where the number of vertical pixels is less than the number of horizon-
tal pixels. This makes the S9037/S9038 series suitable for line scan cameras.
The S9037/S9038 series image sensors have a pixel size of 24 × 24 μm and are available in pixel formats of 512 × 4 pixels
and 1024 × 4 pixels.
The S9038 series has a one-stage thermoelectric cooler assembled in the same package allowing stable operation at cooled
temperatures. Both the S9037/S9038 series image sensors use a quartz glass window equivalent to SUPRASIL glass that
provides high transmittance even at 193 nm wavelength. These image sensors also have stable quantum efficiency in the UV
region making them suitable for excimer laser monitors.
Features
Applications
High-speed operation: 10 MHz
Pixel size: 24 × 24 μm
Excimer laser monitors
High-speed line scan cameras
Line/pixel binning operation
S9038 series: one-stage thermoelectric cooling
High quantum efficiency: 90% or more at peak
MPP operation
Structure
Parameter
Pixel size (H × V)
S9037-0902
S9037-1002
S9038-0902S
24 × 24 ꢀm
S9038-1002S
Number of total pixels (H × V)
Number of effective pixels (H × V)
Image size (H × V)
Vertical clock
520 × 6
512 × 4
1044 × 8
1024 × 4
520 × 6
512 × 4
1044 × 8
1024 × 4
12.288 × 0.096 mm 24.576 × 0.096 mm 12.288 × 0.096 mm 24.576 × 0.096 mm
2 phases
Horizontal clock
2 phases
Output circuit
Two-stage MOSFET source follower
24-pin ceramic DIP
Package
Window material*1
Cooling
Quartz window equivalent to SUPRASIL*2
AR-coated sapphire*3
Non-cooled
One-stage TE-cooled
*1: Window-less type (ex. S9037-0902N) is available as option.
(Temporary window is fixed by tape to protect the CCD and wire bonding.)
*2: Resin sealing
*3: Hermetic sealing
1
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