Pressure sensors
C28 series
Gauge pressure sensor die for back side pressure applications
Technical data
Absolute maximum ratings
Parameter
Symbol
Conditions
Min.
Typ.
Max.
Unit
Supply voltage
Maximum supply voltage
Temperature ranges
VDD
Without damage 1)
10
V
2)
–40
–40
–40
135
140
150
°C
°C
°C
Operating temperature range
Ta
For t <15 min
3)
Storage temperature range
Pressure ranges
Tst
Operating pressure ranges
Over pressure
pr
Gauge pressure 4)
Gauge pressure 5)
Gauge pressure 6)
0 ... 1.6
0 ... 40
bar
pr
pov
pberst
2.5
3
Burst pressure
pr
Electrical specifications
Parameter
Symbol
Conditions
Min.
Typ.
Max.
Unit
Supply voltage / bridge resistance
Operating supply voltage
Total bridge resistance
7)
VDD
RS
1.0
2.7
2.1
4
5.0
3.7
2.7
8
V
@ 25 °C 8)
3.2
2.4
6
kΩ
10–3/K
10–6/K2
αRs
βRs
Temperature coefficient
of total bridge resistance
@ 25 °C 9)
Output signal @ VDD = 5 V
Offset
V0
@ 25 °C 10)
@ 25 °C 13)
–30
0
30
mV
Sensitivity
S
See next table
mV/bar
10–3/K
10–6/K2
% FS
–2.5
3
–2.2
5
–1.9
αS
Temperature coefficient
of the sensitivity
@ 25 °C 15)
8
βS
16)
Pressure hysteresis
pHys
–0.1
0.1
Optional temperature sensing diode
Forward diode voltage
VF
@ 25 °C, IF = 50 µA 17)
@ 25 °C, IF = 50 µA 18)
550
600
650
mV
Temperature coefficient
of forward diode voltage
TCVF
–2.4
–2.2
–2.0
mV/K
Long-term stability (Full scale normal output FSON = 120 mV)
19)
Temperature hysteresis of offset
Temperature cycle drift of offset
High temperature drift of offset
Long term stability of offset
THV0
–0.35
–0.25
–0.25
–0.45
0.2
0.1
0.1
0.3
0.35
0.25
0.25
0.45
% FSON
% FSON
% FSON
% FSON
19)
19)
19)
TCDV0
HTDV0
LTSV0
AS SEN PD
2009-08-03
Please read Cautions and warnings and
Page 3 of 8
Important notes at the end of this document.