Datasheet > B58601D8010A019

B58601D8010A019

更新时间： 2022-12-14 17:57:20

品牌	Logo	应用领域
爱普科斯 - EPCOS		传感器压力传感器
页数	文件大小	规格书
8页	109K
描述
Pressure sensors

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B58601D8010A019 数据手册

Pressure sensors

C28 series

Gauge pressure sensor die for back side pressure applications

Applications

ꢀ Medical devices

ꢀ Automotive

ꢀ Automation

Features

ꢀ Piezoresistive MEMS technology

ꢀ Small dimensions: 2.05 × 2.05 mm

ꢀ Square diaphragm

ꢀ Measured media (back side):

Non-aggressive gases and fluids.

Unsuitable for substances which react with

glass or silicon.

ꢀ Whetstone bridge with mV output,

ratiometric to supply voltage

ꢀ Rated pressure ranges 1.6 up to 40 bar

Options

ꢀ Temperature sensing diode

Delivery mode

ꢀ Tray

Dimensional drawings

150

A B

2050

390

800

560

Note1

allowable edge disruptions

80 µm max.

allowable edge disruptions

50 µm max.

700

electrical diagram:

X10

X1 : Vout–

X2 : VDD–

X3 : VDD–

X4 : Vout+

X5 : VDD+

X8 : Diode (N)

X9 : Diode (P)

X10: Substrate

280 280

560 560

R1 R2

Si 100

glass

BOROFLOATTM

840

850

all dimensions in µm

Note1: geometry of diaphragm depend

on specification

X3 X2

checked bond area (typ. 100µm x 100µm)

AS SEN PD

2009-08-03

Please read Cautions and warnings and

Page 2 of 8

Important notes at the end of this document.

123 4 5 6 7 8

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