Datasheet > MS7930-A_0.2

MS7930-A_0.2

更新时间： 2022-12-20 17:55:28

品牌	Logo	应用领域
INTERSEMA		传感器压力传感器
页数	文件大小	规格书
5页	219K
描述
PRESSURE SENSOR DIE (0-30 BAR)

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MS7930-A_0.2 数据手册

MS7930

PRESSURE SENSOR DIE (0-30 BAR)

• 0 to 3000 kPa range (30 bar or 435 PSI)

• Absolute/differential pressure sensors

• High linearity, small size

• RoHS-compatible & Pb-free¹

DESCRIPTION

The sensor element of the MS7930 consists of a silicon micro-machined membrane. Implanted resistors make

use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This

sensor, which has outstanding linearity and span values, is available in various configurations. The absolute

pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer

used for this sealing has a thickness of 0.2 mm (MS7930-A_0.2) or 0.5 mm (MS7930-A_0.5). There are two

gauge versions available: one with a drilled Pyrex glass (MS7930-D) and the other without Pyrex glass

(MS7930-S).

FEATURES

•

Uncompensated pressure sensor die

Output span 150mV @ 5V

Temperature range -40°…+125°C

•

Linearity 0.05% (typical)

Very small die size 1.72 x 1.58 mm (MS7930-A)

Low cost, high reliability

APPLICATION

•

Absolute pressure sensor systems

Differential/gauge pressure sensor systems

•

Engine controls

Dive computers

ELECTRICAL CONNECTIONS

Positive output for pressure applied topside

Vs+

EPI

Vs+ : Supply voltage of Wheatstone bridge

Epi : Connection of epitaxial layer (membrane)

Out- : Negative output

Out-

Out+

Out+ : Positive output

GND1 : Ground

GND2 : Ground

GND1 GND2

¹The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)

bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers

(PBDE).

DA7930_000.doc

000079301500

March 9, 2009

1/5

ECN 1205

12 3 4 5

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