Datasheet > L10366_15

L10366_15

更新时间： 2024-01-21 20:02:06

品牌	Logo	应用领域
HAMAMATSU		/
页数	文件大小	规格书
4页	342K
描述
HIGH BRIGHTNESS VUV LIGHT SOURCE UNIT

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L10366_15 数据手册

HIGH BRIGHTNESS

VUV

LIGHT

VUV LIGHT SOURCE UNIT

SOURCE

L10366 SERIES

OVERVIEW

The L10366 series are newly developed VUV (va-

cuum UV) light source units.

This product uses a "high-brightness deuterium lamp

with MgF window" that produces a high radiant in-

tensity 4 times higher than conventional model.

This product is now a lot easier to handle due to use

of an air-cooled structure and vacuum flange mount.

TLSZF0004

Left: Power supply, Right: Light source

FEATURES

APPLICATIONS

GHigh Radiant Intensity: 4 Times

Spectrophotometer, Fluorophotometer

(compared to conventional model)

Electrostatic Removal of Semiconductor*

Wafer, LCD Panel, etc.

GPhotoionization Detector (PID)

High VUV Intensity Down to 115 nm

GAir Cooling (needs no cooling water)

GExternal Control

UV Resistance Testing of Various Material

(lamp ON/OFF, lamp ON status signal)

GOptical Chemical Vapor Deposition

No Optical Axis Alignment Required

(optical CVD)

GExcitation Light Source

ARC DISTRIBUTION(at 230 nm)

L10366 series

Conventional type

(Aperture size: 1 mm)

(Aperture size: 0.5 mm)

High Radiant Intensity

x 4

(compared to conventional model)

12 3 4

中文翻译

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