Pressure sensors
C27 series
Gauge pressure sensor die
12)
Full scale value FS
Sensitivity S
The sensitivity is defined for a bridge voltage power supply VDD = 5 V. It can be determined by the formula:
FS = Vout (prmax ) − Vo
13)
Vout (prmax ) − Vo
S =
prmax
This parameter is tested for process control on samples, mounted on AK transducer package (AK2 series).
14)
Nonlinearity L
This parameter may be influenced by assembly.
The nonlinearity is measured using the endpoint method. Assuming a characteristic, this can be approximated
by a polynomial of second order, where the maximum is at px = prmax/2. The nonlinearity is defined at px = prmax/2,
using the equation:
Vout (px ) − Vo
px
L =
−
Vout (prmax ) − Vo prmax
This parameter is tested for process control on samples, mounted on AK transducer package (AK2 series).
15)
Temperature coefficient of sensitivity αS and βS:
These parameters may be influenced by assembly.
The temperature coefficients of sensitivity are tested for design verification on samples, mounted on AK transducer
package (AK2 series) over a reduced temperature range Tmeas,min = –20 °C to Tmeas,max = 80 °C with TR = 25 °C.
The temperature coefficients of first and second order are defined with the polynomial:
2
S(T)=S (T=25°C) 1+α
S(T−25°C
)
+β
S(T−25°C
)
The coefficients αS and βS are calculated using the three measurement points of S(T) at Tmeas,min, TR and Tmeas,max
.
16)
Pressure hysteresis pHys
The pressure hysteresis is the difference between output voltages at constant pressure and constant temperature while
applying a pressure cycle with pressure steps of pr, min, p1, p2, p3, pr,max, p3, p2, p1, pr, min
:
Vout,2(pk )− Vout,1(pk )
pHys =
FS
With k = min, 1, 2, 3, max. The pressure steps are: prmin = 0, p1 = 0.25·pr,max, p2 = 0.5·pr,max, p3 = 0.75·pr, max, pr,max
This parameter is tested for design verification on samples, mounted on AK transducer package (AK2 series).
.
17)
18)
Forward diode voltage VF
The voltage drop is measured across anode and cathode by a forward current of 47 µA.
This parameter is tested completely on a wafer (wafer level test measurement).
Temperature coefficient of forward diode voltage TCVF
The temperature sensitivity of diode voltage drop is defined by the measured values at –20 °C and 80 °C
using the equation:
VF (Tmeas,max ) − VF(Tmeas,min
)
TCVF =
Tmeas,max − Tmeas,min
With Tmeas,min = –20 °C and Tmeas,max = 80 °C and the measurement is done with a constant current of 50 µA.
The estimated temperature coefficient is also valid at temperatures between –40 °C and 135 °C.
This parameter is tested for design verification on samples, mounted on AK transducer package (AK2 series).
19)
Reliability data
For long-term stability of offset voltage LTSV0 please refer to the defined Aktiv Sensor’s standard AS100001 in chapter
“Reliability data” on the internet.
AS SEN PD
2009-08-03
Please read Cautions and warnings and
Page 6 of 8
Important notes at the end of this document.
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