Pressure sensors
C32 series
B58600E32xxB604
Absolute pressure sensor die for wet media C32/2
Symbols and Terms
1)
Maximum power supply VDD
This is the maximal allowed voltage, which may be applied to the piezoresistive bridge circuit without damage.
2)
Operating temperature range Ta
This is the operating temperature range Ta,min to Ta,max. Because most of the sensor parameters depend on assembling
conditions like glueing, wire bonding etc, the die has to be tested over the operating temperature range by the customer
fully assembled. For design verification and process control, samples, mounted in TDK Sensors standard transducer
packages, are tested over the temperature range of Ta,min to Ta,max
.
3)
Storage temperature range Tst
If the pressure sensor dies are stored in the temperature range Tst,min to Tst,max without applied voltage power supply, this
will not affect the performance of the pressure sensor dies.
4)
5)
6)
Operating pressure range pr
In the operating pressure range 0 to pr,max the pressure sensor die output characteristic is as defined in this specification.
Over pressure pOV
Pressure cycles in the pressure range 0 to pov do not affect the performance of the pressure sensor dies.
Burst pressure pburst
Up to the burst pressure pburst the sensor die will not be destroyed mechanically. This parameter is tested at room
temperature on samples mounted on an aluminium socket by increasing a test pressure until the sensor is burst or the
maximum test pressure is achieved. Since the burst pressure depends on several assembling conditions, this parameter
has to be verified by the customer with his assembling possibilities.
7)
Operating power supply VDD
The pressure sensor parameters are defined for a power supply voltage of VDD = 5 V. In the operating power supply
voltage range VDD,min to VDD,max the ratiometric parameters r(VDD) like sensitivity, offset voltage and the temperature
coefficient of the offset voltage are defined by:
VDD
(
)
( [ ])
r VDD = r 5 V
[ ]
5 V
8)
9)
Total bridge resistance Rb
The total bridge resistance is defined between pad X5 and X2 (see the dimensional drawing in this data sheet) of the
closed piezoresistive bridge circuit. The total bridge resistance is in a good approximation the output impedance of the
piezoresistive bridge circuit. This parameter is tested completely on a wafer (wafer level test measurement).
Temperature coefficients of resistance Rb and Rb
:
The temperature coefficients of resistance are tested for design verification on samples, mounted in TDK Sensors
standard transducer package over the temperature range Ta,min to Ta,max with TR = 25 °C.
The temperature coefficients of first and second order are defined with the polynomial:
( )
)ꢁ]
Rb T = Rb T = 25°C 1 + αꢀb T − 25°C + βꢀb T − 25°C
(
)[
(
)
(
The coefficients Rb and Rb are calculated using the three measurement points of Rb(T) at Ta,min, TR and Ta,max
Offset voltage V0
.
10)
The offset voltage V0 is the output voltage Vout(p = 0 bar absolute) at zero absolute pressure and for a bridge voltage
power supply VDD = 5 V. The high range of the allowed offset voltage is due to the reference pressure in the glass cap
from 0 to 0.3 bar and to the tolerance of the sensitivity. The typical value of the reference pressure is 0.2 bar.
Before anodic glass bonding the offset voltage is tested completely on a wafer (wafer level test measurement)
with limits –25 mV < V0 < 25 mV. For design verification V0 is measured on samples, mounted in TDK Sensors standard
transducer package by extrapolating the output characteristic to zero bar.
Since the offset voltage depends on several assembling conditions, this parameter has to be verified by the customer
with his assembling possibilities.
11)
Temperature coefficients of offset voltage TCV0
The temperature coefficients of offset voltage are defined for a bridge voltage power supply VDD = 5 V.
These parameters strongly depend on assembly conditions like gluing, wire bonding etc.
The temperature coefficients of offset voltage are tested for design verification on samples, mounted in TDK Sensors
standard transducer package over a temperature range Ta,min to Ta,max with TR = 25 °C.
TCV0+ and TCV0- are defined for the measurement temperature range by:
(
)
(
)
ꢉꢊꢄ ꢁꢋ°ꢌ
ꢄ ꢇꢈ
ꢉꢊꢄ ꢁꢋ°ꢌ
ꢄ ꢇꢈ
ꢃ
ꢃ
ꢆ
a,max
ꢆ
ꢆ
a,min
ꢆ
TCVoꢂ = ꢄ
TCVoꢊ = ꢄ
ꢈ
ꢊꢁꢋ°ꢌ
ꢈ
ꢊꢁꢋ°ꢌ
a,min
ꢅꢅ
a,max
ꢅꢅ
TPS PRS SD PD
2021-03-19
Please read Cautions and warnings and
Page 5 of 10
Important notes at the end of this document.
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