Replaceable Roughness Profile Measuring Styli (Tip Radius 5 μm)
Applicable models
FLEX-50
Model
S130
S1400
S1500
S1900
S1910
S480
S1800
S2800
S2900
S-NEX001
Measuring application
General purpose
External view
Specifications
Remarks
5 μmR,
90°conical diamond,
• All orientations
010 2501
• Horizontal tracing possible
• All orientations
4 mN
Fine wires,
knife edges
5 μmR,
90°knife edge-shaped
diamond, 5 mN
010 2502
Medium fine
holes
5 μmR,
• All orientations
• Horizontal tracing possible
010 2509
010 2511
010 2512*
010 2513
010 2514*
90°conical diamond,
4 mN
15
Extra fine holes,
gear flank
5 μmR,
90°conical diamond,
4 mN
• All orientations
• Horizontal tracing possible
0.5
Fine holes/
thin grooves
5 μmR,
90°conical diamond,
4 mN
• All orientations
• Horizontal tracing possible
Hole bottom/
conical surfaces
75°
5 μmR,
90°conical diamond,
4 mN
• All orientations
• Horizontal tracing possible
6.1
Corners/
tooth surfaces
5 μmR,
60°conical diamond,
4 mN
• All orientations
• Horizontal tracing possible
Deep grooves/
round grooves
5 μmR,
90°conical diamond,
5 mN
• Downward measurement
• Large waveform distortion
010 2515*
Gear tooth
profiles,
thread flank
5 μmR,
90°conical diamond,
4 mN
7
010 2518
• Magnification: x10000
Fine long holes
• Downward measurement
• Sensitivity: 1/2
• Magnification: x5000
• Large waveform distortion
5 μmR,
90°conical diamond,
5 mN
010 2521
010 2522*
010 2524
010 2527
40.7
Low magnification,
long holes
5 μmR,
90°conical diamond,
5 mN
• Downward measurement
• Sensitivity: 1/2
• Magnification: x20000
Low magnification,
corners
5 μmR,
60°conical diamond,
5 mN
• Downward measurement
• Sensitivity: 1/2
• Magnification: x20000
Deep groove
corners
• Downward measurement
• Sensitivity: 1/2
• Magnification: x10000
• Large waveform distortion
5 μmR,
60°conical diamond,
8 mN
Nosepiece
010 2702, 010 2703, 010 2709,
010 2710, 010 2722
Stylus
5 μmR
Stylus set
010 2640
010 2512, 010 2514,
010 2515, 010 2522
* Indicates stylus/nose piece set 010 2640. The value of measuring force is when E-DT-S01A/E-DT-SE18A are mounted
Standard Inventory Parts
83
TOKYO SEIMITSU