Agilent TwisTorr 84FS
Split Flow
Agilent Quality Assured
Datasheet
Technical Specifications
Main Pumping speed
ISO 63
54
50
The 84FS Split Flow
turbo pump takes
N2
He
H2
l/s
l/s
l/s
advantage of all standard
Agilent 84FS pump
52
Gas throughput at full rotational speed Air cooling
Water Cooling
(25°C, 65 l/h)
features and benefits,
providing, in addition, a
solution for applications
with multiple chambers
to be pumped as GC-MS,
SEM, etc.
(with recommended forepump)
(35°C)
N2
K-ratio
N2
He
Ar
100 sccm
Main-Side
>10+5
100 sccm
Main-Foreline
>10+10
>10+5
>10+5
>10+5
>10+10
Inlet port base pressure with
< 5 x 10-9 mbar (< 3.75 x 10-9 Torr)
recommended forepump (5 m3/h)
Inlet flange
ISO 63
Side port flange
Foreline flange
Rotational speed
Start-up time
KF16 NW
KF16 NW
81000 rpm (1350 Hz driving frequency)
< 2 minutes
Recommended forepump mechanical: Agilent DS 40M / DS 102
dry pump:
Agilent IDP-3 / SH 110
Any
Operating position
Operating ambient temperature
Relative humidity of air
Bakeout temperature
Lubricant
+5 °C to +35 °C
0 - 90 % (not condensing)
80°C at inlet ISO flange
Permanent lubrication
Cooling requirements
- Air Cooling
Air flow temperature +5°C to +35 °C
Cooling water temperature:
- Water Cooling
+15 °C to +25 °C
Minimum flow: 65 l/h (0.30 GPM)
Pressure: 2 to 4 bar (45 to 75 psi)
Noise Pressure Level
(at 1 mt at full speed)
40 dB(A) *
Storage temperature
Max altitude
-40° C to +70° C
3000 m
Certifications
CE, C-CSA-US, RoHS
compliant as per 2011/65/UE
Weight kg (lbs)
Pump ISO 63
kg 2.05
*average value ± 4 dB(A) std deviation