Referenced in 1000’s
of research papers
6517B Electrometer/High Resistance Meter
Datasheet
Key Features
• Measures resistances up to 1018
Ω
• 10 aA (10×10–18 A) current measurement resolution
• Complete hardware-software solution for ASTM
D257 high resistivity measurements with the 6517B,
8009 Resistivity Test Fixture, and the KickStart High
Resistivity Measurement Application
• <3 fA input bias current
• 6½-digit high accuracy measurement mode
• <20 µV burden voltage on the lowest current ranges
The Keithley 6517B Electrometer/High Resistance
Meter is the worldwide research laboratory standard for
sensitive measurements. With over 60 years of low level
measurement expertise, Keithley electrometers provide
reliable measurements of current levels down to 10 aA
(10×10–18 A), charge levels down to 1 fC, and the highest
resistance measurements available up to 1018 Ω. The
6517B is also capable of measuring the largest voltage
range—up to 200 V—with an input impedance exceeding
200 TΩ. All this performance is built into an instrument that
operates as simply as a digital multimeter.
• Voltage measurements up to 200 V with >200 Ω input
impedance
• Built-in 1000 V voltage source
• Unique alternating polarity voltage sourcing
and measurement method for high resistance
measurements
• Built-in test sequences for four different device
characterization tests, surface and volume resistivity,
surface insulation resistance, and voltage sweeping
• Optional plug-in scanner cards for testing up to ten
devices or material samples with one test setup
Exceptional Performance
Specifications
• GPIB and RS-232 interfaces
The 6517B has incorporated Keithley’s decades of
expertise in low level measurement technology into an
innovative, low current input amplifier with an input bias
current of <3 fA, just 0.75 fA p-p noise, and <20 µV
burden voltage on the lowest current ranges. The voltage
circuit input impedance is greater than 200 TΩ for near-
ideal circuit loading. These specifications ensure the
accuracy and sensitivity needed for accurate low current
and high impedance voltage, resistance, and charge
measurements in areas of research such as physics,
optics, nanotechnology, and materials science. A built-
in 1 kV voltage source with sweep capability simplifies
performing leakage, breakdown, and resistance testing,
as well as volume (Ω-cm) and surface resistivity (Ω/square)
measurements on insulating materials.
Wide Measurement Ranges
The 6517B offers autoranging over the full span of
ranges on current, resistance, voltage, and charge
measurements. The 6517B combines the following
measurement capabilities:
• Ultra-sensitive ammeter with current measurement
from 10 aA to 20 mA
• Highest impedance voltmeter with voltage
measurement from 1 µV to 200 V
• Ultra-high range ohmmeter with resistance
measurement from 1 Ω to 1018
Ω
• Sensitive coulombmeter with charge measurement
from 1 fC to 2 µC
A Tektronix Company