SILICON
SM5812/SM5852
MICROSTRUCTURES
Amplified Pressure Sensor
I N C O R P O R A T E D
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NOW WITH ACCESS TO DIGITAL TEMPERATURE AND CORRECTED DIGITAL PRESSURE
LOW-COST, FULLY AMPLIFIED, CALIBRATED, AND COMPENSATED IN A SINGLE PACKAGE
AVAILABLE FOR DIFFERENTIAL, SINGLE-ENDED DIFFERENTIAL, GAGE & ABSOLUTE APPLICATIONS
MULTIPLE PRESSURE RANGES AVAILABLE TO MEASURE PRESSURE DOWN TO 0.15 PSI FULL-SCALE
AND UP TO 100 PSI FULL-SCALE
DESCRIPTION
The Silicon Microstructures SM5812 and
SM5852 series of OEM pressure sensors
combines state-of-the-art pressure sensor
technology with CMOS digital signal
processing technology to produce an
amplified, fully conditioned, multi-order
pressure and temperature compensated
sensor in a dual in-line package (DIP)
configuration.
Combining the pressure sensor with a
custom signal conditioning ASIC in a single
package simplifies the use of advanced
silicon micromachined pressure sensors.
Now, the pressure sensor can be mounted
directly to a standard printed circuit board
and an amplified, high level, calibrated
pressure signal can be acquired from the
digital interface or analog output. This
eliminates the need of additional circuitry,
such as a compensation network or micro-
controller containing a custom correction
algorithm.
FEATURES
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Amplified, calibrated, fully signal
conditioned output span of 4.0 VDC FS
(0.5 to 4.5 V signal)
Digital temperature and calibrated
pressure available through I2C interface
Output ratiometric with supply voltage
Multi-order correction for pressure non-
linearity (factory programmed)
Multi-order correction for temperature
coefficient of span and offset (factory
programmed)
Gage, differential, and absolute versions
SMI’s unique low-pressure die allows for
a full-scale pressure range of 0-0.15 PSI
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The SM5812/SM5852 Series pressure
sensors are based on SMI's highly stable,
piezoresistive pressure sensor chips
mounted on a ceramic substrate. An
electronically programmable ASIC is
contained in the same package to provide
calibration and temperature compensation.
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TYPICAL APPLICATIONS
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Barometric measurement
Medical instrumentation
Pneumatic control
The model SM5812 is designed for
operating pressure ranges from 0-5 PSI up
to 0-100 PSI. The model SM5852 is
designed for operating pressure ranges from
0-0.15 PSI up to 0-3 PSI. For both models,
the sensor output is ratiometric with the
supply voltage.
Gas flow
Respirators and ventilators
Heating, Ventilation and Air Conditioning
(HVAC)
Rev 1.4 6_05
2005 SMI
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 ♦ USA
Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@si-micro.com ♦ www.si-micro.com
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