Low Pressure
Digital Sensor
SM5221, SM5321 & SM5421
Gauge & Differential Pressure Sensors
FEATURES
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Pressure ranges from 0.8 to 2.49 psi; gauge, differential and
asymmetric outputs
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Accuracy: ±1% full scale
14-bit digital, pressure calibrated and temperature compensated
output
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I2C Digital Interface
Compensated temperature range: -20oC to 85oC
Insensitive to mounting orientation
Robust JEDEC SOIC-16 package for automated assembly
Manufactured according to ISO9001 and ISO/TS 16949 standards
DESCRIPTION
The SM5221, SM5321 & SM5421 Series is a digital, low pressure
MEMS sensor family offering state-of-the-art pressure transducer
technology and CMOS mixed signal processing technology to
produce a digital, fully conditioned, multi-order pressure and
temperature compensated sensor in JEDEC standard SOIC-16
package with a dual vertical porting option. It is available in both
compound gage or differential pressure configurations. With the
dual porting, a vacuum-gage measurement is possible to minimize
altitude errors due to changes in ambient pressure.
Combining the pressure sensor with a signal-conditioning ASIC in a
single package simplifies the use of advanced silicon micro-machined
pressure sensors. The pressure sensor can be mounted directly on a
standard printed circuit board and a high level, calibrated pressure
signal can be acquired from the digital interface. This eliminates the
need for additional circuitry, such as a compensation network or
microcontroller containing a custom correction algorithm.
Customer-specified pressure ranges and supply voltages are
available.
The SM5221, SM5321 & SM5421 is shipped in sticks or tape & reel.
Medical
Industrial
Consumer
Sleep Apnea
Airflow Measurement
Sports Equipment
CPAP
Pneumatic Gauges
Pressure Switches
Safety Cabinets
Appliances
Ventilators
Gas Flow Instrumentation
Air Flow Monitors
Negative Pressure Wound Therapy
Life Sciences
Gas Flow Instrumentation
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Silicon Microstructures, Inc. 2001-2017. All rights reserved
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