TDI-CCD image sensors
S10200-02-01 S10201-04-01 S10202-08-01 S10202-16-01
Operating the back-thinned CCD in TDI mode
delivers high sensitivity.
TDI-CCD image sensers capture clear and bright images even under low-light-level conditions. During TDI (time delay integra-
tion) mode, the CCD captures an image of a moving object while transferring integrated signal charges synchronously with
the object movement. This operation mode dramatically boosts sensitivity to high levels even when capturing fast moving
objects. Our new TDI-CCD uses the back-thinned structure to achieve even higher quantum efficiency over a wide spectral
range from UV to near IR region (200 to 1100 nm).
Features
Applications
TDI mode gives high sensitivity
Sequential imaging of high-speed moving samples
Inspection tasks on electronic parts production line
Semiconductor inspection
High-speed, continuous image acquisition
Back-thinned structure ensures high sensitivity from UV to near IR
Multiple ports for high-speed line rate
Low noise
Flow cytometery
TDI mode
In FFT-CCD, signal charges in each line are vertically transferred during charge readout. TDI mode synchronizes this vertical
transfer timing with the movement of the object, so that signal charges are integrated a number of times equal to the number
of vertical stages of the CCD pixels. In the TDI mode, the signal charges must be transferred in the same direction at the same
speed as those of the object to be imaged. These speeds are expressed by the following equation:
v = f × d
v: object moving speed, charge transfer speed, f: vertical transfer frequency, d: pixel size
In the right figure, when the first stage charges are transferred
Schematic diagram showing integrated
to the second stage, an additional charges are produced in the
second stage by photoelectric conversion and accumulated.
When this operation is continuously repeated until reaching
the last stage M (the number of vertical stages), signal charg-
es which are M times greater than the initial charges are accu-
mulated. Since the signal charges on each line are output from
the CCD horizontal shift register, a two-dimensional image can
be continuously acquired. In this way the TDI mode achieves
sensitivity which is M times higher than linear image sensors
exposure by TDI mode
Time1
Time2
Time3
First stage
·
·
·
·
·
Last stage M
KMPDC0139EA
(S/N is improved M times). The TDI mode also improves
sensitivity variations compared to frame mode operation.
Selection guide
Number of
total pixels
(H × V)
1040 × 128
2080 × 128
4160 × 128
4224 × 128
Number of
effective pixels
(H × V)
1024 × 128
2048 × 128
4096 × 128
4096 × 128
1
Number of
ports
Pixel rate
(MHz/port)
Line rate
(kHz)
Vertical
transfer
Applicable
camera
*
Type no.
2 3
S10200-02-01
S10201-04-01
S10202-08-01
S10202-16-01
2
4
8
-
* *
2 3
50
C10000-801
* *
30
Bi-directional
-
-
16
100
1: The C10000 series cameras are products manufactured by Hamamatsu Photonics, System Division (refer to page 14).
2: Temporary window type (S10200-02N-01, S10201-04N-01) is also available upon request.
3: Light-shield mask type (S10200-02M-01, S10201-04M-01) for horizontal register shielding is also available upon request [see device
structure (P.7)]. The light-shield mask’s aperture size in the vertical direction is 96 pixels. The effect of the light-shield mask may
vary depending on the wavelength of the light source in use and the incident angle of light.
*
*
*
1
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