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NSP1832 PDF预览

NSP1832

更新时间: 2024-11-23 17:01:39
品牌 Logo 应用领域
纳芯微 - NOVOSENSE 传感器
页数 文件大小 规格书
8页 296K
描述
纳芯微NSP1832系列MEMS差压传感器芯片主要利用硅的压阻效应,并结合自主研发的MEMS 微加工工艺设计而成,该系传感器晶圆的制造工艺平台经过IATF16949认证,且每片晶圆都经过正/背面

NSP1832 数据手册

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NSP1832 Series  
MEMS Differential Pressure Sensor Die  
Datasheet (EN) 1.0  
Corrosion-resistant Pt metal bond pad structure  
Enhanced reliability with the double bond pad design  
IATF16949 certificated manufactured platform  
AEC-Q103 automotive standards qualified  
ROHS & REACH compliant  
Product Overview  
Novosense NSP1832 series MEMS pressure sensors are  
high-performance and high-reliability MEMS differential  
pressure sensor dies, based on the principle of mono-  
crystalline silicon high sensitivity piezoresistive effect, and  
manufactured by the advanced MEMS technology. The  
NSP1832 series MEMS differential pressure sensors are  
qualified according to AEC-Q103 and guaranteed the  
accuracy and stability better than 1% FS in overall lifetime,  
the typical pressure ranges are 0~±5kPa, 0~±35kPa and  
0~ ± 100kPa, widely used in automotive electronics,  
industrial controls, etc. The corrosion-resistant Pt metal  
bond pads make NSP1832 series pressure sensors to be  
suitable for harsh environment applications such as DPF,  
GPF, EVAP etc. especially.  
Applications  
Gasoline Particulate Filter  
Diesel Particulate Filter  
EVAP Evaporative System  
Industrial Controls  
Device Information  
Part Number  
Span  
Bond Pad Metal  
NSP1832-Axx005  
Pt Metal  
0~±5kPa  
NSP1832-Axx035  
NSP1832-Axx100  
Pt Metal  
Pt Metal  
0~±35kPa  
0~±100kPa  
The wafer manufactured platform of NSP1832 series  
MEMS differential pressure sensors is verified to fulfill the  
International Automotive Standard IATF16949:2016. Each  
wafer is inspected both in backside and frontside by 100%  
AOI and the electronic AOI wafer map is provided for each  
wafer. For additional shipping options, please contact  
Novosense sales.  
Key Features  
Pressure range0~±5kPa, ±35kPa, ±100kPa  
Operating temperature-40~150℃  
Die size1.65mmx1.65mmx0.4mm  
Accuracy and Stability better than 1%FS  
Copyright © 2022, NOVOSENSE  
Page 1  

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