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NSP1631 PDF预览

NSP1631

更新时间: 2024-11-23 17:01:19
品牌 Logo 应用领域
纳芯微 - NOVOSENSE 传感器
页数 文件大小 规格书
8页 309K
描述
纳芯微NSP163x系列MEMS绝压传感器芯片主要利用硅的压阻效应,并结合自主研发的MEMS 微加工工艺设计而成。该系传感器晶圆的制造工艺平台经过IATF16949认证,且每片晶圆都经过正/背面

NSP1631 数据手册

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NSP163x Series  
MEMS Absolute Pressure Sensor Die  
Datasheet (EN) 1.0  
Product Overview  
Applications  
Novosense NSP163x series MEMS pressure sensors are  
high-performance and high-reliability MEMS absolute  
pressure sensor dies, based on the principle of mono-  
crystalline silicon high sensitivity piezoresistive effect, and  
manufactured by the advanced MEMS technology. The  
NSP163x series MEMS absolute pressure sensors are  
qualified according to AEC-Q103 and guaranteed the  
accuracy and stability better than 1% FS in overall lifetime,  
the typical pressure ranges are 0~100kPa, 0~200kPa and  
0~500kPa, widely used in automotive electronics,  
consumer electronics, industrial controls, etc.  
Intake Manifold Pressure Sensor  
Vacuum Booster Pressure Sensor  
Electric Vehicle Battery Pack Pressure Sensor  
Barometric Pressure Sensors  
Industrial Controls  
Device Information  
Part Number  
Span  
Die Size  
NSP1630-Cxx200  
0~200kPa  
1.0mmx1.0mmx0.4mm  
NSP1630-Dxx100  
NSP1631-Axx500  
0~100kPa  
0~500kPa  
1.0mmx1.0mmx0.4mm  
1.0mmx1.0mmx0.4mm  
The wafer manufactured platform of NSP163x series  
MEMS absolute pressure sensors is verified to fulfill the  
International Automotive Standard IATF16949:2016. Each  
wafer is inspected both in the process and at the end of  
process by 100% AOI and the electronic AOI wafer map is  
provided for each wafer. For additional shipping options,  
please contact Novosense sales.  
Key Features  
Pressure range0~100kPa, 200kPa,500kPa  
Operating temperature-40~125℃  
Die size1.0mmx1.0mmx0.4mm  
Accuracy and Stability better than 1%FS  
IATF16949 certificated manufactured platform  
AEC-Q103 automotive standards qualified  
ROHS & REACH compliant  
Copyright © 2022, NOVOSENSE  
Page 1  

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