Datasheet > MS7901

MS7901

更新时间： 2022-12-22 10:06:58

品牌	Logo	应用领域
INTERSEMA		传感器压力传感器
页数	文件大小	规格书
5页	255K
描述
PRESSURE SENSOR DIE (0-1 BAR)

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MS7901 数据手册

MS7901

PRESSURE SENSOR DIE (0-1 BAR)

• 0 to 100 kPa range (1 bar or 14.5 PSI)

• Absolute/differential pressure sensors

• RoHS-compatible & Pb-free¹

DESCRIPTION

The sensor element of the MS7901 consists of a silicon micro-machined membrane. Implanted resistors make

use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This

sensor, which has outstanding linearity and span values, is available in various configurations. The absolute

pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer

used for this sealing has a thickness of 0.2 mm (MS7901-A_0.2) or 0.5 mm (MS7901-A_0.5). There are two

gauge versions available: one with a drilled Pyrex glass (MS7901-D) and the other without Pyrex glass

(MS7901-S).

FEATURES

•

Uncompensated pressure sensor die

Output span 150mV @ 5V

Temperature range -40°…+125°C

•

Linearity 0.05% (typical)

Very small die size 1.78 x 1.78 mm (MS7901-A)

Low cost, high reliability

APPLICATION

•

Absolute pressure sensor systems

Differential/gauge pressure sensor systems

•

Barometers, altimeters

Variometers

ELECTRICAL CONNECTIONS

Positive output for pressure applied topside

Vs+ / EPI

Vs+ : Supply voltage of Wheatstone bridge

Epi : Connection of epitaxial layer (membrane)

Out- : Negative output

Out+ : Positive output

Out-

Out+

GND1 : Ground

GND2 : Ground

R5+

R6+

R5+ : Reference Resistor 5: positive access

R5- : Reference Resistor 5: negative access

R6+ : Reference Resistor 6: positive access

R6- : Reference Resistor 6: negative access

R5 and R6 are

placed on bulk

GND1 GND2

R5-

R6-

¹The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)

bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers

(PBDE).

DA7901_005.doc

00007901872

ECN 1178

January 23^rd, 2009

1/5

12 3 4 5

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MS7901-D	INTERSEMA	PRESSURE SENSOR DIE (0-1 BAR)	获取价格
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