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by MPX5010/D
SEMICONDUCTOR TECHNICAL DATA
INTEGRATED
PRESSURE SENSOR
0 to 10 kPa (0 to 1.45 psi)
0.2 to 4.7 V OUTPUT
The MPX5010 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metalliza-
tion, and bipolar processing to provide an accurate, high level analog output signal that
is proportional to the applied pressure.
Features
•
•
•
•
•
5.0% Maximum Error over 0° to 85°C
Ideally Suited for Microprocessor or Microcontroller–Based Systems
Patented Silicon Shear Stress Strain Gauge
Durable Epoxy Unibody Element
BASIC CHIP
CARRIER ELEMENT
CASE 867–08, STYLE 1
Temperature Compensated over 40° to +125°C
V
S
3
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
X–ducer
SENSING
ELEMENT
1
V
out
DIFFERENTIAL
PORT OPTION
GAIN STAGE #1
CASE 867C–05, STYLE 1
2
PINS 4, 5 AND 6 ARE NO CONNECTS
GND
PIN NUMBER
1
2
3
V
4
5
6
N/C
N/C
N/C
Figure 1. Fully Integrated Pressure Sensor Schematic
out
Gnd
V
S
(1)
MAXIMUM RATINGS
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
Parametrics
Overpressure (P1 > P2)
Symbol
Value
75
Unit
kPa
kPa
°C
(2)
P
max
(2)
Burst Pressure (P1 > P2)
P
burst
100
Storage Temperature
Operating Temperature
T
stg
–40 to +125
–40 to +125
T
A
°C
1. T = 25°C unless otherwise noted.
C
2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 2
Motorola Sensor Device Data
1
Motorola, Inc. 1997