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by MPX2700A/D
SEMICONDUCTOR TECHNICAL DATA
The MPX2700A series device is a silicon piezoresistive pressure sensor providing a
highly accurate and linear voltage output — directly proportional to the applied pressure.
The sensor is a single monolithic silicon diaphragm with the strain gauge and a thin–film
resistor network integrated on–chip. The sensor is laser trimmed for precise span and
offset calibration and temperature compensation.
X–ducer
SILICON
PRESSURE SENSORS
Features
•
•
•
•
•
Unique Silicon Shear Stress Strain Gauge
±1.0% Linearity
Full Scale Span Calibrated to 40 mV
Easy to Use Chip Carrier Package
Basic Element, Single Ported Devices
Available
Application Examples
•
•
•
•
•
•
•
Pump/Motor Controllers
Pneumatic Control
Tire Pressure Gauges
Robotics
BASIC CHIP
CARRIER ELEMENT
CASE 344–11
Style 1
DIFFERENTIAL
PORT OPTION
CASE 350–05
Style 1
Medical Diagnostics
Pressure Switching
Hydraulics
Pin Number
1
2
3
4
Ground
+V
out
V
S
–V
out
MAXIMUM RATINGS
Rating
Overpressure (P1 > P2)
Symbol
Value
2800
Unit
(8)
P
max
kPa
kPa
°C
(8)
Burst Pressure (P1 > P2)
P
burst
5000
Storage Temperature
Operating Temperature
T
stg
–40 to +125
–40 to +125
T
A
°C
V
S
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the
differential pressure applied.
3
The output voltage of the differential or gauge sensor increases with
increasing pressure applied to the pressure side (P1) relative to the vacuum
side (P2). Similarly, output voltage increases as increasing vacuum is applied to
the vacuum side (P2) relative to the pressure side (P1).
Figure 1 shows a block diagram of the internal circuitry on the stand–alone
pressure sensor chip.
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
2
X–ducer
SENSING
ELEMENT
V
out+
4
V
out–
1
X–ducer is a trademark of Motorola, Inc.
GND
Figure 1. Temperature Compensated
Pressure Sensor Schematic
Motorola Sensor Device Data
1
Motorola, Inc. 1996