Order this document
by MPX2100/D
SEMICONDUCTOR TECHNICAL DATA
Motorola Preferred Device
0 to 100 kPa (0 to 14.5 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
The MPX2100 and MPX2101 series device is a silicon piezoresistive pressure sensors
providing a highly accurate and linear voltage output — directly proportional to the
applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain
gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for
precise span and offset calibration and temperature compensation.
Features
•
•
•
•
•
•
Temperature Compensated Over 0°C to +85°C
Unique Silicon Shear Stress Strain Gauge
Easy to Use Chip Carrier Package Options
Available in Absolute, Differential and Gauge Configurations
Ratiometric to Supply Voltage
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
±0.25% Linearity (MPX2100D)
Application Examples
•
•
•
•
•
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Pump/Motor Controllers
Robotics
Level Indicators
Medical Diagnostics
Pressure Switching
Barometers
Altimeters
Figure 1 illustrates a block diagram of the internal circuitry on the stand–alone
pressure sensor chip.
DIFFERENTIAL
PORT OPTION
V
S
3
CASE 344C–01, STYLE 1
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
NOTE: Pin 1 is the notched pin.
2
4
X–ducer
SENSING
ELEMENT
V
out+
PIN NUMBER
V
out–
1
2
Gnd
+V
3
4
V
S
–V
out
out
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The absolute sensor has a built–in reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
Preferred devices are Motorola recommended choices for future use and best overall value.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 6
Motorola Sensor Device Data
1
Motorola, Inc. 1997