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FS1012

更新时间: 2024-11-06 02:55:31
品牌 Logo 应用领域
艾迪悌 - IDT /
页数 文件大小 规格书
6页 298K
描述
Gas and Liquid Flow Sensor Module

FS1012 数据手册

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FS1012  
Datasheet  
Gas and Liquid Flow Sensor Module  
Features  
Description  
The FS1012 MEMS mass flow sensor module measures the flow  
rate using the thermo-transfer (calorimetric) principle. The FS1012  
is capable of measuring a gas or liquid medium.  
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Gas or liquid mediums  
Robust “solid” isolation technology  
Resistant to surface contamination  
No cavity to cause clogging  
The FS1012 offers key advantages over resistor-based flow  
solutions. The sensor utilizes thermopile sensing, which provides  
an excellent signal-to-noise ratio. The sensor comprises a “solid”  
thermal isolation technology and silicon-carbide coating to protect  
it from abrasive wear and provides robustness and long-term  
reliability. In comparison, other sensors typically contain a fragile  
membrane above an etched cavity for the thermal isolation base.  
Resistant to vibration and pressure shock  
Low power application  
Sensitive at low flow rates and differential pressure levels  
Fast response: 2ms  
Millivolt output  
The FS1012 features the sensor fully assembled and wire-bonded  
out to a 6-pin header.  
Supply voltage: 3V to 5V  
Module operating temperature range: 0°C to +85°C  
Typical Applications  
FS1012 Flow Sensor Module  
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Process controls and monitoring  
Oil and gas leak detection  
HVAC and air control systems  
CPAP and respiratory devices  
Automotive mas air flow meter  
Liquid dispensing system  
Basic Application Circuits  
Figure 2. Differential Circuit Example  
Figure 1. Single-Ended Circuit Example  
3V to 5V  
3V to 5V  
Flow Sensor  
Flow Sensor  
HTR1  
HTR2  
HTR1  
HTR2  
Microcontroller/ASIC  
Microcontroller/ASIC  
Differential Amp  
Input Offset Adjustment  
SPI  
I2C  
+
+
SPI  
I2C  
TP1+  
TP1+  
+
+
ADC  
ADC  
TP1–  
TP1–  
TP2+  
PWM  
PWM  
+
TP2–  
Gain: 20X to 100x  
OFFSET  
Gain: 20X to 100x  
GND  
GND  
© 2017 Integrated Device Technology, Inc.  
1
July 20, 2017  

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