FS1012
Datasheet
Gas and Liquid Flow Sensor Module
Features
Description
The FS1012 MEMS mass flow sensor module measures the flow
rate using the thermo-transfer (calorimetric) principle. The FS1012
is capable of measuring a gas or liquid medium.
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Gas or liquid mediums
Robust “solid” isolation technology
Resistant to surface contamination
No cavity to cause clogging
The FS1012 offers key advantages over resistor-based flow
solutions. The sensor utilizes thermopile sensing, which provides
an excellent signal-to-noise ratio. The sensor comprises a “solid”
thermal isolation technology and silicon-carbide coating to protect
it from abrasive wear and provides robustness and long-term
reliability. In comparison, other sensors typically contain a fragile
membrane above an etched cavity for the thermal isolation base.
Resistant to vibration and pressure shock
Low power application
Sensitive at low flow rates and differential pressure levels
Fast response: 2ms
Millivolt output
The FS1012 features the sensor fully assembled and wire-bonded
out to a 6-pin header.
Supply voltage: 3V to 5V
Module operating temperature range: 0°C to +85°C
Typical Applications
FS1012 Flow Sensor Module
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Process controls and monitoring
Oil and gas leak detection
HVAC and air control systems
CPAP and respiratory devices
Automotive mas air flow meter
Liquid dispensing system
Basic Application Circuits
Figure 2. Differential Circuit Example
Figure 1. Single-Ended Circuit Example
3V to 5V
3V to 5V
Flow Sensor
Flow Sensor
HTR1
HTR2
HTR1
HTR2
Microcontroller/ASIC
Microcontroller/ASIC
Differential Amp
Input Offset Adjustment
SPI
I2C
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+
SPI
I2C
TP1+
TP1+
+
+
–
–
ADC
ADC
TP1–
TP1–
–
–
TP2+
PWM
PWM
+
–
TP2–
Gain: 20X to 100x
OFFSET
Gain: 20X to 100x
GND
GND
© 2017 Integrated Device Technology, Inc.
1
July 20, 2017