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by MPX10/D
SEMICONDUCTOR TECHNICAL DATA
0 to 10 kPa (0–1.45 psi)
35 mV FULL SCALE SPAN
(TYPICAL)
The MPX10 series device is a silicon piezoresistive pressure sensor providing a very
accurate and linear voltage output — directly proportional to the applied pressure. This
standard, low cost, uncompensated sensor permits manufacturers to design and add
their own external temperature compensating and signal conditioning networks.
Compensation techniques are simplified because of the predictability of Motorola’s single
element strain gauge design.
Features
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Low Cost
Patented Silicon Shear Stress Strain Gauge Design
Ratiometric to Supply Voltage
Easy to Use Chip Carrier Package Options
Differential and Gauge Options
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
Application Examples
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Air Movement Control
Environmental Control Systems
Level Indicators
Leak Detection
Medical Instrumentation
Industrial Controls
Pneumatic Control Systems
Robotics
DIFFERENTIAL
PORT OPTION
CASE 344C–01, STYLE 1
Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
NOTE: Pin 1 is the notched pin.
PIN 3
+ V
S
PIN NUMBER
PIN 2
+ V
out
1
2
Gnd
+V
3
4
V
S
X–ducer
–V
out
out
PIN 4
– V
out
PIN 1
Figure 1. Uncompensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 5
Motorola Sensor Device Data
1
Motorola, Inc. 1997