Datasheet > 969-9940

969-9940

更新时间： 2022-02-26 08:52:05

品牌	Logo	应用领域
惠普 - HP		/
页数	文件大小	规格书
3页	619K
描述
Agilent Quality Assured

阅读下载

获取价格

数据手册

如果您发现信息不准确，欢迎纠错

969-9940 数据手册

Agilent TwisTorr 84FS

Split Flow

Agilent Quality Assured

Datasheet

Technical Speciﬁcations

Main Pumping speed

ISO 63

The 84FS Split Flow

turbo pump takes

N₂

H₂

l/s

advantage of all standard

Agilent 84FS pump

Gas throughput at full rotational speed Air cooling

Water Cooling

(25°C, 65 l/h)

features and beneﬁts,

providing, in addition, a

solution for applications

with multiple chambers

to be pumped as GC-MS,

SEM, etc.

(with recommended forepump)

(35°C)

N₂

K-ratio

N₂

100 sccm

Main-Side

>10⁺⁵

100 sccm

Main-Foreline

>10⁺¹⁰

>10⁺⁵

>10⁺¹⁰

Inlet port base pressure with

< 5 x 10^-9mbar (< 3.75 x 10^-9Torr)

recommended forepump (5 m³/h)

Inlet flange

ISO 63

Side port flange

Foreline flange

Rotational speed

Start-up time

KF16 NW

81000 rpm (1350 Hz driving frequency)

< 2 minutes

Recommended forepump mechanical: Agilent DS 40M / DS 102

dry pump:

Agilent IDP-3 / SH 110

Any

Operating position

Operating ambient temperature

Relative humidity of air

Bakeout temperature

Lubricant

+5 °C to +35 °C

0 - 90 % (not condensing)

80°C at inlet ISO flange

Permanent lubrication

Cooling requirements

- Air Cooling

Air flow temperature +5°C to +35 °C

Cooling water temperature:

- Water Cooling

+15 °C to +25 °C

Minimum flow: 65 l/h (0.30 GPM)

Pressure: 2 to 4 bar (45 to 75 psi)

Noise Pressure Level

(at 1 mt at full speed)

40 dB(A) *

Storage temperature

Max altitude

-40° C to +70° C

3000 m

Certifications

CE, C-CSA-US, RoHS

compliant as per 2011/65/UE

Weight kg (lbs)

Pump ISO 63

kg 2.05

*average value ± 4 dB(A) std deviation

12 3

下载PDF

与969-9940相关器件

型号	品牌	描述	获取价格	数据表
9699941	HP	Agilent TwisTorr 84 FS	获取价格
969-9941	HP	Agilent Quality Assured	获取价格
969-9941M001	HP	Agilent Quality Assured	获取价格
969-9941M003	HP	Agilent Quality Assured	获取价格
969-9941M005	HP	Agilent Quality Assured	获取价格
9699942	HP	Agilent TwisTorr 84 FS	获取价格